非平行光束对窄带滤光片光谱性能的影响  

Influence of nonparallel beams on the spectral properties of the narrow-band filter

作　　者：何文彦[1,2,3] 孔明东 任戈[1,2,3] 魏铭 He Wenyan;Kong Mingdong;Ren Ge;Wei Ming(Institute of Optics and Electronics,Chinese Academy of Sciences,Chengdu 610209,China;Key Laboratory of Optical Engineering,Chinese Academy of Sciences,Chengdu 610209,China;University of Chinese Academy of Sciences,Beijing 100049,China)

机构地区：[1]中国科学院光电技术研究所,四川成都610209 [2]中国科学院光束控制重点实验室,四川成都610209 [3]中国科学院大学,北京100049

出　　处：《红外与激光工程》2022年第8期415-421,共7页Infrared and Laser Engineering

摘　　要：因为发散角和线宽效应的存在,非平行光束入射窄带滤光片时,滤光片的透射特性会发生变化。特别是在斜入射时,窄带滤光膜透射通带波形更易从矩形向三角形退化,并且伴随峰值透过率降低等负面现象。虽然已知的卷积模型可以对非平行光束入射窄带滤光片的情况进行数值模拟,但是由于制备和测量误差的阻碍,其正确性和数值模拟的准确性没有严格的实验进行验证。通过膜系优化和测量误差修正降低相应误差及其影响,并通过等离子体辅助反应磁控溅射(PARMS)的方法制备了工作角度为17°的1064 nm高性能窄带滤光片。滤光片的透射光谱分别由两款分光光度计Cary 7000和Lambda 1050测量得到。在不同条件下测得的光谱与数值模拟结果吻合得很好,充分验证了卷积模型的有效性和数值模拟的准确性。Because of the divergence angle and linewidth effects,the filter’s transmission characteristics will change when a nonparallel beam irradiates the narrow-band filter.Especially at oblique incidence,the passband waveform of the narrow-band filter film is more likely to degenerate from rectangular to triangular,and negative phenomena such as the transmittance peak decrease appear.Although the known convolution model can simulate this variation numerically,there is no strict experimental verification for the model’s correctness and the accuracy of numerical analysis due to obstacles of preparation and measurement errors.For this verification,the corresponding errors are overcome through film optimization and measurement error correction.A highperformance 1064 nm narrow-band filter at an incident angle of 17°was fabricated by plasma-assisted reactive magnetron sputtering(PARMS).The transmission characteristics were measured by two spectrophotometers,Cary 7000 and Lambda 1050,separately.The spectra are coincident with the numerical simulation under different conditions.Therefore,the validity of the convolution model and the high accuracy of the numerical simulation are adequately justified.

关 键 词：窄带滤光片 数值模拟 发散角效应 线宽效应 

分 类 号：O484[理学—固体物理]