一种基于图像处理的红外微扫描器件测量与校准的方法  

An Infrared Micro Scanner Measurement and Calibration Method Based on Image Processing

作　　者：王贵全 徐志文 段永进 施浩坤 蒋旭珂 李彦生 张雨璇 张劼 WANG Guiquan;XU Zhiwen;DUAN Yongjin;SHI Haokun;JIANG Xuke;LI Yansheng;ZHANG Yuxuan;ZHANG Jie(Kunming North Infrared Technology Corporation Limited,Kunming 650217,China)

机构地区：[1]昆明北方红外技术股份有限公司,云南昆明650217

出　　处：《红外技术》2022年第9期964-971,共8页Infrared Technology

摘　　要：在以红外焦平面为核心的红外成像系统中,微扫描器件可以有效提高整个系统的空间分辨率。针对微扫描器件的检测,本文提出了一种基于图像处理的测量与校准方法,并搭建了一套检测系统用于对微扫描器件进行检测与校准。以某型微扫描器件为测试对象,实验结果表明本文所提方法在测量精度、重复精度以及不确定度方面均达到了良好的效果,可以为微扫描器件的设计、生产提供基础支撑。In infrared imaging systems, in which the core is an infrared focal plane array, a microscanner can enhance the spatial resolution of the entire system. To test microscanners, this study developed a measurement and calibration method based on image processing and built a system to measure and calibrate microscanners.Using a microscanner as a test subject, the test results indicate that the proposed method has a significant effect on the measurement accuracy, repetition accuracy, and uncertainty. The method can provide technical support for the design and manufacture of microscanners.

关 键 词：红外焦平面 微扫描器件 检测方法 图像处理 

分 类 号：TN219[电子电信—物理电子学]