微纳加工与表征技术在高性能集成有机光电器件研究中的应用  

Research on the Application of Micro-Nano Fabrication and Characterization Techniques in the Research of High-Performance Integrated Organic Optoelectronic Devices

作　　者：朱文昌 吴海华[1] Zhu Wenchang;Wu Haihua(Institute of Functional Nano and Soft Materials,Soochow University,Suzhou 215123)

机构地区：[1]苏州大学功能纳米与软物质研究院,江苏苏州215123

出　　处：《中阿科技论坛（中英文）》2022年第9期121-127,共7页China-Arab States Science and Technology Forum

基　　金：国家自然科学基金青年基金项目“Li2YO3(Y=Ti、Zr和Mn)壳层调控高镍三元NMC811正极材料结构有序度及储锂性能基础研究”(21703147)。

摘　　要：微纳加工与表征技术是实现高性能集成光电器件的必要手段。基于有机半导体的光电器件具有可柔性化、低成本以及可溶液法制备的优势,可广泛应用于光探测、信息显示、健康监测、智能穿戴设备等领域。文章通过介绍可用于制备高性能集成光电器件的主流微纳加工与表征手段和技术原理,综述了其在高性能集成有机光电器件研究中的重要进展,结合研究实例对比分析了不同微纳加工与表征手段在实际研究中的优劣点。Micro-nano fabrication and characterization techniques are necessary for high-performance integrated optoelectronic devices.Due to merits of flexibility,low cost and solution-producible,semiconductor-based optoelectronic devices can be widely used in light detection,information display,health monitoring,smart wearable devices and other fields.In this paper,by introducing the mainstream micro-nano fabrication and characterization methods and technical principles,the significant progress in the research of high-performance integrated organic optoelectronic devices is reviewed,and the pros and cons of various methods in practical research are discussed in detail.

关 键 词：微纳加工与表征技术 高性能 高集成度 有机光电器件 

分 类 号：TN15[电子电信—物理电子学]