基于光机热集成分析的大规模拼接焦面误差分配  

Large-scale splicing focal plane error distribution based on opticalstructural-thermal integration analysis

作　　者：牛盛光 郭亮[1] 陆振玉[1] 韩康[1] NIU Sheng-guang;GUO Liang;LU Zhen-yu;HAN Kang(Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,China;University of Chinese Academy of Sciences,Beijing 100049,China)

机构地区：[1]中国科学院长春光学精密机械与物理研究所,吉林长春130033 [2]中国科学院大学,北京100049

出　　处：《中国光学（中英文）》2022年第5期1000-1006,共7页Chinese Optics

基　　金：国家自然科学基金资助项目(No.61605203);中国科学院青年创新促进会资助项目(No.2015173)。

摘　　要：随着空间天文、态势感知、环境监测等领域的要求越来越高,空间望远镜正在向着大视场、大口径的方向发展。大规模焦面拼接技术是大视场空间望远镜的关键技术,其主焦面平面度误差(P-V值)分配方法一般都是基于经验的直接赋值法,容易出现误差分配不合理的问题。本文提出一种拼接焦面误差分配方法,通过光机热集成分析对重要参数误差进行精确分配。以16片互补金属氧化物半导体(CMOS)图像传感器4×4机械直接拼接焦面为例,建立了拼接焦面误差树,通过光机热集成分析方法分析了重力和温度等重要参数对拼接焦面平面度的影响,最终给出误差分配结果。分析结果表明:两种不同姿态下重力造成的平面度误差分别为0.28μm、1.55μm,温度造成的平面度总误差为5.5μm,留30%余量后,确定重力和温度引起的平面度误差分配值分别为2μm和7.2μm。As the requirements of space astronomy,situational awareness,environmental monitoring and other fields grow higher,space telescopes are developing toward large fields of view and large apertures.Largescale focal plane stitching technology is the key technology of large-field space telescopes.The allocation method of the main focal plane flatness error(P-V value)is generally a direct assignment method based on experience,which is prone to unreasonable error allocation.In this paper,a method of splicing focal plane error allocation is proposed,which can accurately allocate important parameter errors through optical-structural-thermal integration analysis.Taking 4×4 mechanical direct splicing focal plane with 16 pieces of Complementary Metal Oxide Semiconductor(CMOS)image sensor as an example,an error tree of splicing focal planes is established.The influence of important parameters such as gravity and temperature on the flatness of splicing focal plane is analyzed by the method of optical-structural-thermal integration analysis.The error distribution result is finally given.The analysis shows that the flatness errors caused by gravity under two different attitudes are 0.28μm and 1.55μm respectively,and the total flatness error caused by temperature is 5.5μm.After leaving a 30%margin,the assigned values of the flatness error caused by gravity and temperature are determined to be 2μm and 7.2μm,respectively.

关 键 词：焦面变形 光机热集成分析 误差分配 CMOS拼接 

分 类 号：TH74[机械工程—光学工程]