努森真空泵内部流导的蒙特卡洛模拟  

A Monte Carlo Simulation for the Inner Flow Conductance of Knudsen Vacuum Pump

作　　者：王范宇 柯杰坤 谭丽萍 卢苇 Wang Fanyu;Ke Jiekun;Tan Liping;Lu Wei(School of Mechanical Engineering,Guangxi University,Guangxi,530004)

机构地区：[1]广西大学机械工程学院,广西530004

出　　处：《当代化工研究》2022年第17期25-27,共3页Modern Chemical Research

基　　金：广西自然科学基金项目“热流逸式气体分离装置(系统)设计及性能优化”(项目编号:2019GXNSFAA185024)。

摘　　要：努森真空泵是一种热能驱动的无运动部件的真空泵,因其内部微通道本身就是一种特殊的管道,故也存在流导。本文建立了努森真空泵内部微通道流导的蒙特卡洛模拟模型。计算结果表明,就矩形微通道而言,若长宽比不变,则流导随高宽比的增大而近似线性地增大;若截面积不变,则流导随长度的增加而减小;若长度较短,则流导随高宽比的增大而减小,但随着长度的增加,由高宽比变化引起的流导变化幅度逐渐减弱。此外,圆形微通道流导的性能优于椭圆形和矩形的,短微通道流导的性能较长微通道的好,适当增加截面面积可较明显地提升流导性能。The Knudsen vacuum pump, driven by thermal energy, is a certain type of vacuum pump without moving parts. There is flow conductance in the Knudsen vacuum pump since its internal microchannels are special tubes themselves. In this paper, a Monte Carlo simulation model of flow conductance is established for the inner microchannel in the Knudsen vacuum pump. The calculated results show that, for rectangular microchannel, the flow conductance approximatively increases linearly with the increase of height-width ratio at a certain length-width ratio, while decreasing with the increase of length at a certain cross section ratio. Besides, the flow conductance decreases with the increased of height-width ratio when length is relatively short. With the increase of length, the change range of flow conductance caused by the change of height-width narrows down gradually. In addition, circular microchannel is better than elliptic and rectangular microchannels in terms of flow conductance, as well as flow conductance is better in short microchannel than in long microchannel. The flow conductance can be obviously improved by increasing the crosssection area appropriately.

关 键 词：热流逸 微通道 真空泵 流导 蒙特卡洛模拟 

分 类 号：TB752[一般工业技术—真空技术]