多晶硅生产中含氟废酸液处理工艺  

Treatment Process of Fluorine-containing WasteAcid in Polycrystalline Silicon Production

作　　者：杜青青[1] Du Qing-qing

机构地区：[1]江苏中圣高科技产业有限公司,江苏南京210009

出　　处：《化工设计通讯》2022年第9期44-46,共3页Chemical Engineering Design Communications

摘　　要：多晶硅生产中会排放少量的含氟废酸液,该股废液可以经中和沉淀预处理后,并入厂区尾气洗涤及渣浆废水进行后续处理,也可以单独实现废液零排放。主要对含氟废酸液的蒸发结晶零排放处理工艺路线、设备选型及尾气处理工艺流程进行阐述。A small amount of fluorine-containing waste acid will be discharged in polycrystalline silicon production.This waste liquid can be pretreated by neutralization and precipitation,and then merged into the plant exhaust gas washing and slurry wastewater for subsequent treatment;it can also achieve zero liquid discharge alone.This paper expounds the zero liquid discharge and exhaust gas treatment process of fluorine-containing waste acid.

关 键 词：含氟废酸液 中和沉淀 零排放 蒸发结晶 尾气处理 

分 类 号：TQ075.1[化学工程]