相移与焦移法在调制度测量轮廓术中的应用  

Application of Phase-Shifting and Focal-Switching Method in Modulation Measurement Profilometry

作　　者：陆泳屹 钟敏 赵旭[1] 王嘉卉 张学琴 李敏 甘曜玮 戴湘麟 黄锴志 Lu Yongyi;Zhong Min;Zhao Xu;Wang Jiahui;Zhang Xueqin;Li Min;Gan Yaowei;Dai Xianglin;Huang Kaizhi(College of Optoelectronic Engineering,Chengdu University of Information Technology,Chengdu 610225,Sichuan,China)

机构地区：[1]成都信息工程大学光电工程学院,四川成都610225

出　　处：《光学学报》2022年第15期80-88,共9页Acta Optica Sinica

基　　金：国家自然科学基金(61801057);四川省教育厅项目(18ZB0124);大学生创新创业训练项目(202010621108,202110621229,202110621232,202210621251)。

摘　　要：提出一种基于相移与焦移法的三维面形垂直测量方法,当投影仪变焦扫描被测物体的深度信息时,将三步相移中的三帧条纹图依次连续循环投影到被测物体表面上,相机同步采集对应的条纹图。在计算投影仪每一焦距值对应的条纹图的调制度分布时,利用该焦距位置及其前后相邻焦距值位置处的三帧条纹图近似计算该焦距位置处的调制度分布,并根据调制度值最大值与深度信息的关系重建被测物体的三维形貌。实验结果表明,所提方法的条纹投影量和数据采集量仅占传统三步相移法的1/3,却可获得与传统三步相移法几乎相同的测量精度。在1100μm测量深度范围内,相移与焦移法对任意位姿斜面的测量均方根误差平均值可达4.98μm。A three-dimensional vertical surface measurement method based on phase-shifting and focal-switching method is proposed.When the projector scans the depth information of the measured object,the three-frame fringe patterns in the three-step phase-shifting method will be projected to the surface of the measured object as a continuous loop,and the corresponding fringe patterns are collected synchronously by the camera.When calculating the modulation distribution of the fringe pattern for each focal length value of the projector,the modulation distribution at the focal length position is approximately calculated by using the three-frame fringe patterns of the focal length position and its adjacent position before and after the focal length value,and the three-dimensional shape of the measured object is reconstructed according to the relationship between the maximum modulation value and the depth information.Experimental results show that the amount of fringe projection and data collection of the proposed method is only one third of that of the the traditional threestep phase-shifting method,but the measurement accuracy is almost the same as that of the traditional three-step phaseshifting method.In the depth range of 1100μm,the average root-mean-square error for the inclined plane with different poses can reach 4.98μm by using phase-shifting and focal-switching method.

关 键 词：测量 光学微观三维面形测量 调制度测量轮廓术 垂直测量 相移方法 

分 类 号：O438[机械工程—光学工程]