非制冷热红外成像光谱仪内部杂散辐射的分析与抑制  

Analysis and Suppression of Stray Radiation in Uncooled Thermal Infrared Imaging Spectrometer

作　　者：谢鑫龙 朱晓晓 朱嘉诚 沈为民 Xie Xinlong;Zhu Xiaoxiao;Zhu Jiacheng;Shen Weimin(Key Lab of Modern Optical Technologies of Education Ministry of China,School of Optoelectronic Science and Engineering,Soochow University,Suzhou 215006,Jiangsu,China;Key Lab of Advanced Optical Manufacturing Technologies of Jiangsu Province,School of Optoelectronic Science and Engineering,Soochow University,Suzhou 215006,Jiangsu,China)

机构地区：[1]苏州大学光电科学与工程学院教育部现代光学技术重点实验室,江苏苏州215006 [2]苏州大学光电科学与工程学院江苏省先进光学制造技术重点实验室,江苏苏州215006

出　　处：《光学学报》2022年第15期96-102,共7页Acta Optica Sinica

基　　金：国家自然科学基金项目(62105230);中国博士后科学基金(2020M681700)。

摘　　要：尺寸小、成本低和寿命长的非制冷热红外成像光谱仪对探测高温目标有巨大潜力,但其严重的内部噪声会降低检测灵敏度。非制冷热红外成像光谱仪主要的噪声包括探测器噪声、光机元件表面散射杂光引起的噪声、光栅非工作级次产生的杂光噪声和光机元件自身的背景辐射噪声。推导了包含上述噪声的噪声等效温差(NETD)公式,以Offner型热红外成像光谱仪为例,分析NETD与系统F数和机械元件内表面光学属性等主要影响因素之间的关系,研究了光机表面抛亮处理在抑制光谱仪内部背景辐射噪声方面的能力。最后,采用像元间线性关系法扣除了剩余的噪声,使探测信号与目标本身信号基本一致。The uncooled thermal infrared imaging spectrometer with small size,low cost,and long life has great potential for detecting high-temperature targets,but its severe internal noise will reduce the detection sensitivity.The main noise of uncooled thermal infrared imaging spectrometer includes the detector noise,the noise caused by the stray light from the surface of the opto-mechanical component,stray light noise generated by the non-working order of the grating,and the background radiation noise of the opto-mechanical component.The noise equivalent temperature difference(NETD)formula containing the above noise is derived.Taking the Offner thermal infrared imaging spectrometer as an example,the relationship among NETD,the F number of the system,and the optical properties of the inner surface of mechanical components is analyzed.Then,the ability of opto-mechanical surface polishing to suppress the internal background radiation noise of the spectrometer is studied.Finally,the linear relationship between pixels is used to remove the remaining noise,so that the detection signal is basically consistent with the target signal.

关 键 词：仪器 非制冷红外成像光谱仪 内部热辐射 杂散辐射抑制 噪声等效温差 表面抛亮 

分 类 号：O436.[机械工程—光学工程]