压阻式压力传感器的温度补偿及现场校准方法  

Temperature compensation and field calibration method based on piezoresistive pressure sensor

作　　者：周志炜 邓天雨 师亮 陈宝成 张蒙 姜超 ZHOU Zhiwei;DENG Tianyu;SHI Liang;CHEN Baocheng;ZHANG Meng;JIANG Chao(The 49th Research Institute of China Electronics Technology Group Corporation,Harbin 150028,China;China Aero Engine Control System Research Institute,Wuxi 214000,China)

机构地区：[1]中国电子科技集团公司第四十九研究所,黑龙江哈尔滨150028 [2]中国航发控制系统研究所,江苏无锡214000

出　　处：《传感器与微系统》2022年第10期145-148,共4页Transducer and Microsystem Technologies

摘　　要：针对硅压阻式压力传感器受到外界环境的影响,其灵敏度、分辨率、动态范围、工作直线等关键技术指标会发生改变。本文提出一种现场在线式校准方法,通过建立压力,温度误差数学模型和采用数字滤波及曲线拟合温度补偿技术,对传感器信号的误差进行补偿。使变送器在-20~80℃温度区间内,输出精度达到±0.1%FS。该校准方法和电路可规范化,工程应用背景广泛。Sensitivity, resolution, dynamic range, working line and other key technical indicators of silicon piezoresistive pressure sensors will change due to the influence of the external environment.An scene on-line calibration method is proposed, which compensates the error of sensor signal by establishing the mathematical model for pressure and temperature error and adopting digital filtering and curve fitting temperature compensation technology.Make the output precision of the transmitter reach ±0.1 % FS within the temperature range of-20~80 ℃.The calibration method and circuit can be standardized, and the engineering application background is wide.

关 键 词：硅压阻式变送器 在线式校准方法 数学模型 数字滤波 温度补偿 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]