压电材料驱动的微型回热式制冷机研究进展  

Advances in piezoelectric-driven miniature regenerative refrigerators

作　　者：潘权稳 王浩任 王博 李睿泽 赵钦宇 闫春杰[3] 甘智华 Pan Quanwen;Wang Haoren;Wang Bo;Li Ruize;Zhao Qingyu;Yan Chunjie;Gan Zhihua(Cryogenic Center,Zhejiang University City College,Hangzhou 310027,China;Key Laboratory of Refrigeration and Cryogenic Technology of Zhejiang Province,Zhejiang University,Hangzhou 310027,China;Vacuum&Cryogenics Technology and Physics Laboratory,Lanzhou Institue of Physics,Lanzhou 730030,China)

机构地区：[1]浙大城市学院低温中心,杭州310015 [2]浙江大学,浙江省制冷与低温技术重点实验室,杭州310027 [3]兰州空间技术物理研究所,真空技术与物理重点实验室,兰州730030

出　　处：《低温与超导》2022年第8期1-7,共7页Cryogenics and Superconductivity

基　　金：国家自然科学基金(52006190);真空技术与物理重点实验室基金(HTKJ2021KL510005)资助。

摘　　要：在介绍现有高集成度电子器件高效散热需求的基础上,分析了压电材料驱动的回热式制冷机的结构形式、工作性能与技术特点,重点总结了微型斯特林制冷机的研究进展。相比于传统电子器件的集中式散热冷却,采用压电薄膜驱动的微型斯特林制冷机可实现较高的制冷密度,并具有环境友好、可靠性高和制冷温区广等优点,使得该技术在电子器件中芯片的精准高效冷却领域具有较大潜力,但需要从高频微尺度交变流动高效传热机理,微结构回热器优化和超高频大压比驱动源等方面进行更深入的研究。For heat dissipation in integrated electronic devices,the structures,performance and technical characteristics of piezoelectric driven miniature regenerative refrigerators were analyzed,and the advances of miniature Stirling refrigerators were focused.Compared with traditional centralized cooling methods in electronic devices,the piezoelectric driven miniature Stirling refrigerator has the advantages of environmental friendliness,high feasibility and wide range of cooling temperature to achieve a high density of cooling power,making it a promising technology for accurate and efficient cooling on chips of electronic devices.However,heat transfer of oscillating flows in microstructure with high frequency,optimization of micro-regenerator for efficient cooling and selection of piezoelectric material in driving source need to be further investigated.

关 键 词：微型斯特林制冷机 微型热声制冷机 电子器件 热管理 

分 类 号：TB651[一般工业技术—制冷工程]