Reliable and broad-range layer identification of Au-assisted exfoliated large area MoS_(2)and WS_(2)using reflection spectroscopic fingerprints  

作　　者：Bo Zou Yu Zhou Yan Zhou Yanyan Wu Yang He Xiaonan Wang Jinfeng Yang Lianghui Zhang Yuxiang Chen Shi Zhou Huaixin Guo Huarui Sun 

机构地区：[1]School of Science and Ministry of Industry and Information Technology Key Laboratory of Micro-Nano Optoelectronic Information System,Harbin Institute of Technology Shenzhen,Shenzhen 518055,China Collaborative Innovation Center of Extreme Optics,Shanxi University,Taiyuan 030006,China [2]State Key Laboratory of Superlattices and Microstructures,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China [3]University of Science and Technology of China,Hefei 230026,China [4]Science and Technology on Monolithic Integrated Circuits and Modules Laboratory,Nanjing Electronic Devices Institute,Nanjing 210016,China

出　　处：《Nano Research》2022年第9期8470-8478,共9页纳米研究（英文版）

基　　金：the Key-Area Research and Development Program of Guangdong Province(No.2020B010169002);the Natural Science Foundation of Guangdong Province(No.2020A1515010885);the Science and Technology Planning Project of Shenzhen Municipality(No.JCYJ20190806142614541);the Key Laboratory Fund(No.61428060205).

摘　　要：The emerging Au-assisted exfoliation technique enables the production of a wealth of large-area and high-quality ultrathin two dimensional(2D)crystals.Fast,damage-free,and reliable determination of the layer number of such 2D films can greatly promote layer-dependent physical studies and device applications.Here,an optical method has been developed for simple,high throughput,and accurate determination of the layer number for Au-assisted exfoliated MoS_(2)and WS_(2)films in a broad thickness range.The method is based on quantitative analysis of layer-dependent white light reflection spectra(WLRS),revealing that the intensity of exciton-induced reflection peaks can be used as a clear indicator for identifying the layer number.The simple yet robust method will facilitate fundamental studies on layer-dependent optical,electrical,and thermal properties and device applications of 2D materials.The technique can also be readily combined with photoluminescence(PL)and Raman spectroscopies to study other layer-dependent physical properties of 2D materials.

关 键 词：Au-assisted exfoliation MoS_(2)and WS_(2) layer identification white light reflection spectra excitonic peaks 

分 类 号：O657.3[理学—分析化学]