激光剥蚀高分辨电感耦合等离子体质谱的表面成像技术在钢板线状缺陷分析中的应用探讨  

Study on Mapping Analysis in Line Defect Analysis of Steel Plate by Laser Ablation HR Inductively Coupled Plasma Magnetic Mass Spectrometry

作　　者：朱莉[1] 张毅[1] 于永波 李龙 胡莹[1] 纪红玲[1] ZHU Li;ZHANG Yi;YU Yongbo;LI Long;HU Ying;JI Hongling(Central Research Institute,Baoshan Iron and Steel Co.,Ltd.,Shanghai 201900,China)

机构地区：[1]宝武钢铁集团中央研究院,上海201900

出　　处：《中国无机分析化学》2022年第4期136-141,共6页Chinese Journal of Inorganic Analytical Chemistry

摘　　要：为探讨钢板表面条纹、裂纹等线状缺陷的成分分析,采用激光剥蚀高分辨电感耦合等离子体质谱(LA-HR-ICP-MS)技术得到与钢铁材料表面线状缺陷及缺陷周围正常部位的上万个元素质谱信号,与实际样品位置信息比对,各信号与样品表面原始位置相对应,反应样品表面各成分的二维统计分布信息。用该表面成像技术获得的钢板表面线状缺陷区域元素分布结果与电子探针X射线显微分析(EPMA)、激光剥蚀飞行时间质谱(LA-TOF-MS)分析结果一致。方法具有激发斑点适中、微损、原位分析、检测限低、二维成像直观显示的特点,解决了传统表面微区分析技术检测限偏高、激发斑点过小的问题,可作为表面线状缺陷异常元素甄别的有力工具,为寻找缺陷成因、改进工艺提供依据。To discuss the composition analysis of linear defects such as stripes and cracks on the surface of steel plate,laser ablation high resolution inductively coupled plasma magnetic mass spectrometry(HR-LA-ICP-MS)was used to obtain the tens of thousands mass signals of area,which covered line defects and defects around in steel plate surface.Each signal was corresponded to the original position on the steel surface,reflecting the two-dimensional statistical distribution information of each component of the sample surface.The data obtained by HR-LA-ICP-MS was in accordance with the analysis results of the method of EPMA and LA-TOF-MS.The method had advantages of modest excitation spot,microscopic damage analysis,in situ analysis,low detection limit and two-dimensional imaging.It solved some problems of the traditional surface microanalysis technology,such as higher detection limit and too small excitation spot,which can be used to screen the abnormal elements of linear defects on the steel plate surface in order to provide new criteria basis for improving production process.

关 键 词：激光剥蚀 高分辨电感耦合等离子体质谱 表面成像 微区分析 钢板 线状缺陷 

分 类 号：O657.63[理学—分析化学] TH843[理学—化学]