电子能量对沿面介质阻挡放电等离子体化学产物的影响  

Effects of Electron Energy on the Chemical Products of Surface Dielectric Barrier Discharge Plasma

作　　者：刘坤 左杰 李华[2,3] 项红甫 冉从福 杨明昊 耿文强 LIU Kun;ZUO Jie;LI Hua;XIANG Hongfu;RAN Congfu;YANG Minghao;GENG Wenqiang(School of Electrical Engineering,Chongqing University,Chongqing 400044,China;School of Life&Environmental Sciences;Guangxi Key Laboratory of Automatic Detecting Technology and Instruments,Guilin University of Electronic Technology,Guilin 541004,China)

机构地区：[1]重庆大学电气工程学院,重庆400044 [2]桂林电子科技大学生命与环境科学学院 [3]广西自动检测技术与仪器重点实验室,桂林541004

出　　处：《高等学校化学学报》2022年第10期158-165,共8页Chemical Journal of Chinese Universities

基　　金：国家自然科学基金(批准号:51877021,61864001);电力设备电气绝缘国家重点实验室开放课题(批准号:EIPE21204);广西自动检测技术与仪器重点实验室基金(批准号:YQ21204)资助.

摘　　要：基于光电倍增管研制了一套无触发信号的双通道光学探测系统,并组装了测试样机,实现了对沿面介质阻挡放电(SDBD)等离子体约化电场的测量,进而通过BOLSIG+软件获得了电子能量.采用原位紫外吸收光谱和傅里叶变换红外光谱,研究了SDBD等离子体在不同电压和频率下的化学产物的浓度变化,并结合空气等离子体化学反应揭示了产物相互作用的微观机理.结果表明,电子能量能够改变电子碰撞反应的速率系数,调控化学反应的源头活性粒子的浓度,进而影响到化学产物的生成和猝灭.A dual-channel optical detection system without trigger signal was developed based on photomultiplier tube,and a test prototype was established to accomplish the measurement of the approximate electric field of surface dielectric barrier discharge(SDBD)plasma,thus allowing the determination of the electron energy by the BOLSIG+software.In addition,the changes of chemical products in SDBD plasma at different voltages and frequencies were researched by in⁃situ UV absorption spectrum and Fourier transform infrared spectrum.On this basis,the micro⁃scopic mechanism of product interaction was analyzed in conjunction with the plasma chemical reactions.The results indicated that the electron energy could change the rate coefficient of electron collision reactions and regulate the concentration of reactive particles which are the source of chemical reactions,thus affecting the generation and quenching of chemical products.Therefore,the present study contributes to a better understanding of the physicochemical processes in low-temperature plasmas and provides a referable scientific and theoretical basis for the regulation of plasma products applications.

关 键 词：沿面介质阻挡放电 化学产物 约化电场 电子能量 

分 类 号：O646.9[理学—物理化学]