基于三维微流控芯片的图案化ZnO纳米棒阵列的生长  

Growth of Patterned ZnO Nanorod Arrays Based on 3D Microfluidic Chip

作　　者：李亚冰 付蕾浩 王振龙 赵振杰[1] 李欣[1] Li Yabing;Fu Leihao;Wang Zhenlong;Zhao Zhenjie;Li Xin(Engineering Research Center for Nanophotonics and Aduanced Instrument of Ministry of Education,School of Physics and Electronic Science,East China Normal University,Shanghai 200241,China)

机构地区：[1]华东师范大学物理与电子科学学院纳光电集成与先进装备教育部工程研究中心,上海200241

出　　处：《微纳电子技术》2022年第9期936-944,974,共10页Micronanoelectronic Technology

基　　金：国家自然科学基金资助项目(11774091,11704122)。

摘　　要：设计并制备了一种低成本的三维微流控芯片,通过芯片中的微腔室进行ZnO纳米棒的合成,探究微腔室中不同位置、腔室高度和体积流量下合成的ZnO纳米棒形貌和尺寸的变化规律。利用扫描电子显微镜(SEM)和X射线衍射仪(XRD)对ZnO纳米棒的形貌和晶体结构进行表征。结果表明,利用该微流控芯片可实现图案化ZnO纳米棒阵列的生长;在流场的影响下,50μm高的微腔室内生长的ZnO纳米棒更为均匀。此外,在20μL/min体积流量下合成的ZnO纳米棒具有最大长径比,对异硫氰酸荧光素(FITC)标记的羊抗牛免疫球蛋白实现了最强的荧光增强效果。结果表明,基于三维微流控芯片的合成方法实现了图案化ZnO纳米棒阵列的生长,并以微腔室为单位为荧光检测提供了一种经济高效、高通量的方法。A low-cost 3 D microfluidic chip was designed and fabricated. Zinc oxide(ZnO) nanorods were synthesized in microchambers of the chip. And the change rules of morphologies and sizes of ZnO nanorods synthesized at different locations of microchambers with varied heights and under different volume flow rates were investigated. The morphology and crystal structure of ZnO nanorods were characterized by scanning electron microscope(SEM) and X-ray diffractiometer(XRD). The results show that the growth of patterned ZnO nanorod arrays can be achieved with the microfluidic chip. Due to the influence of the flow field, ZnO nanorods grown in the microchamber with a height of 50 μm are more uniform. Besides, ZnO nanorods synthesized at a volume flow rate of 20 μL/min have the largest aspect ratio, indicating the strongest fluorescence enhancement effect to fluorescein isothiocyanate(FITC) labeled goat anti-bovine IgG. The results reveal that based on the 3 D microfluidic chip, the growth of patterned ZnO nanorod arrays is realized by the synthesis method, and a cost-effective and high-throughput method for fluorescence detection by the unit of microchamber is provided.

关 键 词：纳米棒 纳米材料 微流控芯片 图案化生长 荧光检测 

分 类 号：TB383[一般工业技术—材料科学与工程]