紫外超短脉冲的准分子激光放大技术  

Excimer laser amplification technology of ultraviolet ultrashort pulse

作　　者：张艳琳 游利兵 王宏伟 王琪 胡泽雄 范军 方晓东[1,2] ZHANG Yanlin;YOU Libing;WANG Hongwei;WANG Qi;HU Zexiong;FAN Jun;FANG Xiaodong(Anhui Provincial Key Laboratory of Photonic Devices and Materials,Anhui Institute of Optics and Fine Mechanics,HFIPS,Chinese Academy of Sciences,Hefei 230031,China;University of Science and Technology of China,Hefei 230026,China;College of New Materials and New Energies,Shenzhen Technology University,Shenzhen 518118,China;School of Electronic and Applied Physics,Hefei University of Technology,Hefei 230009,China;Shenzhen Shengfang Technology Limited Company,Shenzhen 518173,China)

机构地区：[1]中国科学院合肥物质科学研究院安徽光学精密机械研究所,安徽省光子器件与材料重点实验室,安徽合肥230031 [2]中国科学技术大学,安徽合肥230026 [3]深圳技术大学新材料与新能源学院,广东深圳518118 [4]合肥工业大学电子科学与应用物理学院,安徽合肥230009 [5]深圳盛方科技有限公司,广东深圳518173

出　　处：《量子电子学报》2022年第5期677-686,共10页Chinese Journal of Quantum Electronics

基　　金：国家自然科学基金,41627803;安徽省重点研究和开发计划项目,1804a0802219;深圳市科技计划资助项目,KQTD20170331115422184。

摘　　要：由于具有波长短、聚焦特性好、峰值功率高等优势,紫外超短脉冲在超快科学、强场物理等领域具有重要的应用价值。准分子激光工作气体作为增益介质在放大紫外超短脉冲方面具有独特的优势,利用准分子激光放大紫外超短脉冲获得高强度的激光输出为紫外激光的应用提供了新的可能性。概括介绍了准分子激光放大的特点,进而基于准分子的放大特性分单元介绍了紫外超短准分子激光放大技术,并对深紫外超短脉冲脉宽的测量进行了简单阐述。Ultraviolet ultrashort pulses have important application value in the fields of ultrafast science and strong field physics due to their short wavelength, excellent focusing characteristics, and high peak power. Excimer laser gas as gain medium has unique advantages in amplifying ultraviolet ultrashort pulses, so using excimer lasers to amplify ultraviolet ultrashort pulses to obtain high-intensity laser output provides a new possibility for the application of ultraviolet lasers. This article introduces the features of excimer laser amplification briefly firstly, then describes the ultraviolet ultrashort excimer laser technology in units based on the amplification characteristics of excimer, and at last describes the measurement of deep ultraviolet ultrashort pulse duration as well.

关 键 词：激光技术 紫外超短脉冲 准分子激光放大 脉宽测量 

分 类 号：TN248[电子电信—物理电子学]