大气压射频介质阻挡放电辉光放电和丝状放电的时空演化比较  

Comparison of Spatial-temporal Evolution of Glow Discharge and Filament Discharge in Radio Frequency Dielectric Barrier Discharge at Atmospheric Pressure

作　　者：李森[1] 潘杰[1] 王琳[1] 陈强[2] 刘忠伟[2] LI Sen;PAN Jie;WANG Lin;CHEN Qiang;LIU Zhong-wei(Shanghai Publishing and Printing College,Shanghai 200093,China;Laboratory of Plasma Physics and Materials,Beijing Institute of Graphic Communication,Beijing 102600,China)

机构地区：[1]上海出版印刷高等专科学校,上海200093 [2]北京印刷学院等离子体物理及材料研究室,北京102600

出　　处：《包装工程》2022年第19期128-133,共6页Packaging Engineering

基　　金：上海市教育委员会、上海市教育发展基金会“晨光计划”(16CGB10)。

摘　　要：目的为研究大气压射频(13.56 MHz)介质阻挡放电(rf-DBD)在辉光放电和丝状放电2种模式下的电离形式,以及在一个放电周期(73.7 ns)内气体电离与时间和空间的关系。方法实验使用氩气获得稳定的辉光放电,使用氩气掺杂氮气获得丝状放电。实验中使用电流正向过零点的信号触发ICCD相机获得一个放电周期内不同时间点的36张照片,得出放电间隙之间不同位置的发光强度在一个周期内随时间的变化关系。结果在α模式下,每半个周期所产生的一次电子雪崩在空间和时间上都是从阴极到阳极的过程。在γ模式下存在负辉现象,并且在阴极电极的介质表面,负辉强度峰值的时间比体电离强度峰值时间晚约13 ns。在丝状放电中,等离子体的发光强度主要集中在阴极表面,介质表面积累的电荷之间的互相作用力使得放电形成单独的细小通道。结论α模式以体电离为主,而γ模式下除了体电离,还有离子撞击阴极表面产生的大量二次电子,并且比体电离的产生更晚。在丝状放电中,电介质表面电荷作用明显,阴极介质表面的电离为放电的主要形式。The work aims to study the ionization modes of glow discharge and filament discharge in radio frequen-cy barrier discharge(rf-DBD)at atmospheric pressure(13.56 MHz)and explore the relationship between gas ionization and time and space during one period(73.7 ns).Argon was used to obtain stable glow discharge while filament discharge was obtained by argon doped with nitrogen.In the experiment,ICCD camera was triggered when current crossed zero forward to capture 36 photos at different time points during one period,and the relationship between intensity and time at different positions in the discharge gap during one period was obtained.Inαmode,the generation of electron avalanche took place from cathode to anode both spatially and temporally every half period.Inγmode,there was negative glow,and on the dielectric surface of the cathode electrode,the peak time of the intensity of negative glow was about 13 ns later than that of volume ionization.In filament discharge,the luminescence intensity of plasma was mainly concentrated on the cathode surface.The interaction force between the charges accumulated on the surface of the medium caused the gen-eration of independent small channels.Therefore,inαmode,volume ionization is dominant,while inγmode,in addition to volume ionization,abundant secondary electrons are generated by the impinging of ions on the cathode surface,occur-ring later than volume ionization.In filament discharge,the charge on the dielectric surface plays an important role,and the ionization on the surface of the cathode medium is the main form of discharge.

关 键 词：大气压 介质阻挡放电 放电模式 

分 类 号：O539[理学—等离子体物理]