集成电路制造企业研磨废水处理实验研究  

作　　者：徐子义 盛勇 柳晋清 

机构地区：[1]苏州瑞赛泽环境设计工程有限公司,江苏苏州215000 [2]常州常大创业环保科技有限公司,江苏常州213161 [3]江苏鑫翰环境监测科技有限公司,江苏盐城224200

出　　处：《环境保护与循环经济》2022年第8期28-31,共4页environmental protection and circular economy

摘　　要：利用Fe_(3)O_(4)磁种对集成电路制造企业研磨废水进行絮凝法处理,具有较好的沉降效果。最佳处理实验条件为:系统pH为3.0或4.0、外加磁场强度为0.20 T、Fe_(3)O_(4)磁性颗粒重复利用2次、Fe_(3)O_(4)投加量为6 g,此时系统浊度和总硅去除率分别可达99.22%与99.79%。江苏某集成电路制造企业采用Fe_(3)O_(4)磁种絮凝法工艺对研磨废水进行处理,年运行费用可节约40万元,经济效益显著。The use of Fe_(3)O_(4) magnetic seeds to treat the grinding wastewater of integrated circuit manufacturing enterprises by flocculation has a good sedimentation effect.Optimal treatment experimental conditions:the pH value of the system is 3 or 4,the external magnetic field strength is 0.20 T,the Fe_(3)O_(4) magnetic particles are reused twice,and the Fe_(3)O_(4) dosage is 6 g.At this time,the system turbidity and total silicon removal rate can reach 99.22%and 99.79%.An integrated circuit manufacturing enterprise in Jiangsu uses the Fe_(3)O_(4) magnetic seed flocculation method to treat the grinding wastewater,the annual operating cost can be saved by 400000 yuan,and the economic benefit is remarkable.

关 键 词：研磨废水 絮凝法 Fe_(3)O_(4)磁种 

分 类 号：TD74[矿业工程—矿井通风与安全]