基于PCB钎焊工艺制作小型双PCB组合式气体FAIMS传感器及其实验研究  

Fabrication and Experimental Study of Small Double PCB Combined Gas FAIMS Sensor Based on PCB Brazing Process

作　　者：曾鸿达 杜晓霞 牟家浩 黄介南 李华[1] ZENG Hongda;DU Xiaoxia;MOU Jiahao;HUANG Jienan;LI Hua(School of Life and Environmental Sciences,GuiLin University of Electronic Technology,Guilin Guangxi 541004,China)

机构地区：[1]桂林电子科技大学生命与环境科学学院,广西桂林541004

出　　处：《传感技术学报》2022年第7期865-872,共8页Chinese Journal of Sensors and Actuators

基　　金：国家自然科学基金项目(61864001,62163009);广西自然科学基金重点项目(2021JJD170019);广西自动检测技术与仪器重点实验室主任基金(YQ21111);广西高校中青年教师科研基础能力提升项目(2022KY0206)。

摘　　要：为解决FAIMS成本高、工艺复杂等问题,基于PCB钎焊技术,设计制作了一种小型双PCB组合式气体FAIMS传感器。该传感器在PCB极板上设计了U型气孔槽,利用低温焊锡膏将极板隔离并形成离子通道,使板间距控制在0.2 mm,并将针-环离子源、迁移区以及检测区进行了组合,组合尺寸为61 mm×57 mm×3.4 mm。针-环离子源中针尖曲率半径为28μm的不锈钢针为放电阴极,PCB极板上3 mm过孔敷铜的铜环作为放电阳极。研究表明,随着射频电压的升高,分辨率从0.3增加到3.9,增加载气湿度能提高谱峰的分辨率,增加载气流速能提高谱峰的灵敏度,加入一定比例的改性剂能够实现同分异构体的分离,且传感器对乙酸乙酯的检出限达到64μg/L,检测时间为6 s。所设计的FAIMS传感器具有造价低、气密性好、分辨率高等特点。In order to solve the problems of high cost and complex process of FAIMS,a small double PCB combined gas FAIMS sensor is designed and fabricated based on PCB brazing technology.A U-shaped air hole slot is designed in the PCB pole plate,using a low-temperature solder paste to isolate the plate and form ion channels,so that the distance between the plates is controlled at 0.2 mm.The needle-ring ion source,the drift tube and detection zone have been combined to a size of 61 mm×57 mm×3.4 mm.The steel needle with tip radius of curvature of 28μm is used as the discharge cathode,and a 3 mm over-hole copper ring in the PCB electrode plate is regarded as the discharge anode.The results show that the resolution increases from 0.3 to 3.9 with the increase of RF voltage,and the increase of carrier gas humidity could improve the resolution of the spectral peaks.The increase of carrier gas flow rate could improve the sensitivity of the spectral peaks.It shows that the addition of a certain proportion of modifier could achieve the separation of isomers,and the detection limit of the sensor reached 64μg/L for ethyl acetate with a detection time of 6 s.The FAIMS sensor designed is characterized as low cost,good air tightness and high resolution.

关 键 词：高场非对称波形离子迁移谱 PCB钎焊工艺 气体传感器 针-环离子源 

分 类 号：TP212.3[自动化与计算机技术—检测技术与自动化装置]