多光束干涉光纤FP探针脉动微压传感研究  

Research on the multi-beam interference optical fiber Fabry-Perot probe for pulsating micro-pressure sensing

作　　者：张雯[1,2] 熊洁 李昊业 韩静 祝连庆[1,2] Zhang Wen;Xiong Jie';Li Haoye;Han Jing;Zhu Lianqing(Beijing laboratory of Optical Fiber Sensing and System,Beijing Information Science&Technology Unirersity,Beijing 100192.China;Key Laboratory of the Ministry of Education for Optoelectronic Measurement Technology and Instrument,Beijing Information Science&Technology University,Bejing 100016,China;Bejing Tiantan Hospial,Capial Medical University,Beijing 100070,China)

机构地区：[1]北京信息科技大学光纤传感与系统北京实验室,北京100192 [2]北京信息科技大学光电测试技术及仪器教育部重点实验室,北京100016 [3]首都医科大学附属北京天坛医院,北京100070

出　　处：《仪器仪表学报》2022年第7期82-93,共12页Chinese Journal of Scientific Instrument

基　　金：北京市自然科学基金(4202027);国家自然科学基金(61801030,62003346);高等学校学科创新引智计划(D17021)项目资助。

摘　　要：本文提出一种面向脉动微压传感的多光束干涉光纤法布里-珀罗(FP)探针。建立探针多光束干涉波长漂移与微压传感模型,分析其在气、液相环境中微压灵敏度差异。采用化学腐蚀、放电熔接、精密切割技术制备光纤探针器件。利用医用注射器、透明柔性软管、石英插芯构建微压测试环境,通过有限元仿真分析测试环境内部压强分布情况,在气相环境压强范围14.41~85.22 kPa、液相环境压强范围4.50~26.02 kPa的测试条件下,对3支光纤探针微压传感特性进行分析。实验结果表明,气、液相环境中,探针波长均随压强增大发生红移现象,反之,发生蓝移现象;气相环境探针平均微压灵敏度可达8.210 pm·kPa,液相环境探针平均微压灵敏度可达66.720 pm·kPa,高于气相环境,与理论模型相符。选取气、液相环境中微压灵敏度最高的光纤探针进行液相脉动微压传感特性研究。实验结果表明,5个脉动周期内探针波长响应良好,且重复性误差较小。本文提出的光纤探针结构紧凑,易于制备,灵敏度高,可实现1 Hz频率范围内的脉动微压传感,为液相环境脉动微压传感提供了重要的参考价值。A multi-beam interference optical fiber Fabry-Perot probe for pulsating micro-pressure sensing is proposed in this article. The probe′s multi-beam interference wavelength drift and micro-pressure sensing models are formulated, and the micro-pressure sensitivity difference between gas and liquid environments is analyzed. The optical fiber probes are fabricated by chemical corrosion, electric discharge welding and precision cutting technology. The micro-pressure sensing environment is set up using medical syringe, transparent flexible hose, and quartz ferrules. The internal pressure distributions are analyzed by finite element simulation. Three optical fiber FP probes are measured under the gas pressure from 14.41 to 85.22 kPa and the liquid pressure from 4.50 to 26.02 kPa. Experimental results show that in both gas and liquid environments, the probe wavelength has a red-shift with the pressure increase, and a blue-shift with the pressure decrease. The probe′s average micro-pressure sensitivity in gas environment can reach 8.210 pm·kPa. In liquid environment, it can reach 66.720 pm·kPa, which is higher and is consistent with the theoretical prediction. The optical fiber FP probe featuring the highest micro-pressure sensitivity in both gas and liquid environments is selected for the liquid pulsating micro-pressure sensing measurement. Experimental results show that the probe has good wavelength response and the repeatability error is small within five pulsating cycles. The optical fiber FP probe proposed in this article has the advantages of compact structure, easy fabrication, and high micro-pressure sensitivity. It can realize pulsating micro-pressure sensing in the frequency range of 1 Hz, which provides an important reference value for micro-pressure sensing applications in liquid environment.

关 键 词：光纤传感 多光束干涉 法布里-珀罗探针 脉动微压传感 

分 类 号：TH744[机械工程—光学工程]