耦合式MEMS微波功率传感器的研究  

Study of the coupled MEMS microwave power sensor

作　　者：靳雷生 辛泽辉 王德波[1] Jin Leisheng;Xin Zehui;Wang Debo(College of Integrated Circuit Science and Engineering,Nanjing University of Posts and Telecommunications,Nanjing 210023,China)

机构地区：[1]南京邮电大学集成电路科学与工程学院,南京210023

出　　处：《仪器仪表学报》2022年第7期94-101,共8页Chinese Journal of Scientific Instrument

基　　金：国家青年自然科学基金(61704086)项目资助。

摘　　要：为了从根本上解决在线式微波功率传感器灵敏度、动态范围和微波性能之间的矛盾,本文创新性地设计出一种耦合在线式MEMS微波功率传感器,将微波功率的提取和检测两个过程相互独立。根据理论解析模型,得到了灵敏度特性与耦合度的关系,分析对比了耦合度分别为10%和20%时的微波特性及灵敏度特性差异。实验结果表明:两种耦合式MEMS微波功率传感器的反射损耗均小于-20 dB,说明具有良好的反射性能;两种耦合式MEMS微波功率传感器的插入损耗均大于-1.5 dB,说明具有良好的传输性能。耦合度10%的系统灵敏度为1.2 mV/W@9 GHz、1.4 mV/W@10 GHz和0.8 mV/W@11 GHz,耦合度20%的系统灵敏度为2.4 mV/W@9 GHz、2.4 mV/W@10 GHz和1.3 mV/W@11 GHz,并具有良好的线性度。本文对于MEMS微波功率传感器研究具有一定的参考价值。To solve the contradiction among the sensitivity, the dynamic range and the microwave performance of the on-line microwave power sensor fundamentally, a coupled on-line MEMS microwave power sensor is designed creatively in this article. It makes the extraction and detection of microwave power independent of each other. According to the theoretical analysis model, the relationship of the sensitivity characteristics with the coupling degree is obtained, and the differences are analyzed and compared in microwave characteristics and sensitivity characteristics when the coupling degree are 10% and 20%, respectively. Experimental results show that the reflection loss values of the two kinds of coupled MEMS microwave power sensors are both smaller than-20 dB, indicating that they have good reflection performance. The insertion loss of the two kinds of coupled MEMS microwave power sensors is larger than-1.5 dB, indicating that they have good transmission performance. The sensitivity of the system with 10% coupling degree is 1.2 mV/W@9 GHz, 1.4 mV/W@10 GHz and 0.8 mV/W@11 GHz. And the sensitivity of the system with 20% coupling degree is 2.4 mV/W @ 9 GHz, 2.4 mV/W@ 10 GHz and 1.3 mV/W@11 GHz, and they have good linearity. This article has a certain reference value for MEMS microwave power sensors.

关 键 词：MEMS功率传感器 悬臂梁 灵敏度 动态范围 耦合度 

分 类 号：TH89[机械工程—仪器科学与技术] TN62[机械工程—精密仪器及机械] TP212.1[电子电信—电路与系统]