Imaging ultrafast evolution of subwavelengthsized topography using single-probe structured light microscopy  

作　　者：JIE XU CHANGJUN MIN YUQUAN ZHANG JIELEI NI GENGWEI CAO QIANYI WEI JIANJUN YANG XIAOCONG YUAN 

机构地区：[1]Nanophotonics Research Center,Shenzhen Key Laboratory of Micro-Scale Optical Information Technology&Institute of Microscale Optoelectronics,Shenzhen University,Shenzhen 518060,China [2]State Key Laboratory of Applied Optics,Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,China

出　　处：《Photonics Research》2022年第8期1900-1908,共9页光子学研究（英文版）

基　　金：Guangdong Major Project of Basic and Applied Basic Research(2020B0301030009);National Natural Science Foundation of China(62175157,61935013,61975128,62005175);Leading Talents of Guangdong Province(00201505);Natural Science Foundation of Guangdong Province(2019TQ05X750);Shenzhen Science and Technology Program(JCYJ20210324120403011,KQTD20170330110444030,RCJC20210609103232046);Jilin Provincial Science&Technology Development Project(20200201086JC)。

摘　　要：Imaging ultrafast processes in femtosecond(fs) laser–material interactions such as fs laser ablation is very important to understand the physical mechanisms involved. To achieve this goal with high resolutions in both spatial and temporal domains, a combination of optical pump–probe microscopy and structured illumination microscopy can be a promising approach, but suffers from the multiple-frame method with a phase shift that is inapplicable to irreversible ultrafast processes such as ablation. Here, we propose and build a wide-field singleprobe structured light microscopy(SPSLM) to image the ultrafast three-dimensional topography evolution induced by fs lasers, where only a single imaging frame with a single structured probe pulse is required for topography reconstruction, benefiting from Fourier transform profilometry. The second harmonic of the fs laser is used as the structured probe light to improve spatial lateral resolution into the subwavelength region of ~478 nm, and the spatial axial and temporal resolutions are estimated to be ~22 nm and ~256 fs, respectively. With SPSLM, we successfully image the ultrafast topography evolution of a silicon wafer surface impacted by single and multiple fs pulses. The variable formation and evolution of the laser induced periodic surface structures during an ultrashort time are visualized and analyzed. We believe that SPSLM will be a significant approach for revealing and understanding various ultrafast dynamics, especially in fs laser ablation and material science.

关 键 词：PUMP TOPOGRAPHY EVOLUTION 

分 类 号：TN249[电子电信—物理电子学] TH742[机械工程—光学工程]