Ultrafast miniaturized GaN-based optoelectronic proximity sensor  

作　　者：XIAOSHUAI AN HONGYING YANG YUMENG LUO ZHIQIN CHU KWAI HEI LI 

机构地区：[1]School of Microelectronics,Southern University of Science and Technology,Shenzhen 518055,China [2]Department of Electrical and Electronic Engineering,The University of Hong Kong,Hong Kong,China [3]School of Biomedical Sciences,The University of Hong Kong,Hong Kong,China [4]Engineering Research Center of Integrated Circuits for Next-Generation Communications,Ministry of Education,Southern University of Science and Technology,Shenzhen 518055,China [5]Engineering Research Center of Three Dimensional Integration in Guangdong Province,Southern University of Science and Technology,Shenzhen 518055,China

出　　处：《Photonics Research》2022年第8期1964-1970,共7页光子学研究（英文版）

基　　金：NSQKJJ(K20799112);HKSAR Research Grants Council(RGC)Early Career Scheme(27202919);Shenzhen Natural Science Foundation Stability Support Program Project(20200925160044004);National Natural Science Foundation of China(12074170,62004088)。

摘　　要：In this work, a novel ultrafast optoelectronic proximity sensor based on a submillimeter-sized GaN monolithic chip is presented. Fabricated through wafer-scale microfabrication processes, the on-chip units adopting identical In Ga N/Ga N diode structures can function as emitters and receivers. The optoelectronic properties of the on-chip units are thoroughly investigated, and the ability of the receivers to respond to changes in light intensity from the emitter is verified, revealing that the sensor is suitable for operation in reflection mode. Through a series of dynamic measurements, the sensor is highly sensitive to object movement at subcentimeter distances with high repeatability. The sensor exhibits ultrafast microsecond response, and its real-time monitoring capability is also demonstrated by applying it to detect slight motions of moving objects at different frequencies, including the human heart rate, the vibration of the rotary pump, the oscillation of the speaker diaphragm, and the speed of the rotating disk. The compact and elegant integration scheme presented herein opens a new avenue for realizing a chip-scale proximity sensing device, making it a promising candidate for widespread practical applications.

关 键 词：PROXIMITY sized ROTATING 

分 类 号：TN20[电子电信—物理电子学] TP212[自动化与计算机技术—检测技术与自动化装置]