激光薄膜特性参数测试方法标准化进展(特邀)  

Recent Progress on Standardization in Characterization of Optical Coatings for Laser Applications(Invited)

作　　者：李斌成 王静 RISTAU Detlev LI Bincheng;WANG Jing;RISTAU Detlev(School of Optoelectronic Science and Engineering,University of Electronic Science and Technology of China,Chengdu 610054,China;Institute of Quantum Optics,Leibniz University Hannover,Hannover 30167,Germany)

机构地区：[1]电子科技大学光电科学与工程学院,成都610054 [2]汉诺威莱布尼兹大学量子光学研究所,德国汉诺威30167

出　　处：《光子学报》2022年第9期32-41,共10页Acta Photonica Sinica

基　　金：国家重点研究发展计划(No.2021YFC2202203)。

摘　　要：综述了近年来激光薄膜元件反射率/透过率、吸收损耗、散射损耗和激光损伤阈值等主要性能参数测试方法的标准化进展。重点分析了分光光度法、激光比率法和光腔衰荡法三种标准的反射率/透过率测试方法的优缺点,指出了分光光度法和光腔衰荡法的适用范围。分析了激光量热法测量薄膜元件吸收损耗的优点和不足,介绍了正在制定中的光热吸收测量国际标准的主要内容和进展情况,明确激光量热法主要适用于实验室薄膜元件吸收损耗绝对值的确定,而光热法更适用于大口径元件吸收损耗的确定和吸收型缺陷分布的成像测量。介绍了激光损伤阈值测试方法目前正在修订版本的主要技术内容和区别,修订后的激光损伤阈值测试方法国际标准将考虑客户的测试要求,测试结果可更满足工程应用需求。最后介绍了中国主持国际标准制定修订情况及国际标准在中国的转化情况。In this paper,the progress mainly achieved in the last four years on the standardization in characterization of optical coatings for laser applications was reviewed.The standardized test methods for Reflectance/Transmittance(R/T),absorptance(A),Total Scattering(TS)and Angle Resolved Scattering(ARS),and Laser Induced Damage Threshold(LIDT)of optical laser components were summarized.For R/T measurements,the three standardized test methods,i.e.,spectrophotometry(ISO 15368),laser ratio(ISO 13697),and Cavity Ring-Down(CRD)(ISO 13142),were compared.The laser ratio method was rarely used in practice due to the technical complexity,while both spectrophotometry and CRD were widely used for R/T characterization of optical coatings used in laser systems.It is recommended to use spectrophotometry and CRD for the measurements of R/T lower and higher than 99.5%,respectively.Meanwhile,it is highly not recommended to use spectrophotometry to measure R/T higher than 99.9%and to use CRD to measure R/T lower than 99.0%.For absorptance measurement,the current standardized test method is Laser Calorimetry(LC)(ISO 11551).The absolute absorptance value was obtained by LC via simple temperature calibration.However,LC was limited to measuring samples with a cylindrical shape with a diameter between 20 mm to 50 mm and thickness between 0.5 mm to 10 mm.To respond to the need of absorptance measurements and absorption mapping of large-sized laser components(with diameter larger than 50 mm),test methods based on Photothermal(PT)techniques,such as Photothermal Deflection(PTD)and Thermal Lens(TL)in either reflected or transmitted schemes,were developed for measuring the absorptance and mapping the absorption distribution of large-sized laser components.It is pointed out that the reliability of the absolute absorptance measurement with PT methods depend largely on the calibration of the PT amplitude.To obtain reliable absorptance values,the PT amplitude of coating sample under test has to be calibrated with a“known”coating sample with the s

关 键 词：标准化 测试方法 激光损伤阈值 反射率/透过率 吸收损耗 散射损耗 

分 类 号：O439[机械工程—光学工程]