全固态连续228 nm深紫外激光器研究  

Research on All-solid-state Continuous-wave 228 nm Deep Ultraviolet Laser

作　　者：赵志斌 程成 李权 徐东昕 陈浩 刘国军 乔忠良 王德波 郑权 曲轶 薄报学 ZHAO Zhibin;CHENG Cheng;LI Quan;XU Dongxin;CHEN Hao;LIU Guojun;QIAO Zhongliang;WANG Debo;ZHENG Quan;QU Yi;BO Baoxue(State Key Laboratory of High Power Semiconductor Laser,Changchun University of Science and Technology,Changchun 130022,China;College of Physics and Electronic Engineering,Key Laboratory of Laser Technology and Optoelectronic Functional Materials of Hainan Province,Hainan Normal University,Haikou 571158,China;Changchun New Industries Optoelectronics Technology Co.,Ltd.,Changchun 130103,China)

机构地区：[1]长春理工大学高功率半导体激光国家重点实验室,长春130022 [2]海南师范大学物理与电子工程学院海南省激光技术与光电功能材料重点实验室,海口571158 [3]长春新产业光电技术有限公司,长春130103

出　　处：《光子学报》2022年第9期236-242,共7页Acta Photonica Sinica

基　　金：海南省重大科技计划(No.ZDKJ2019005);国家自然科学基金(Nos.61774024,61864002,61964007,11764012);海南省院士创新平台科研专项项目(No.YSPTZX202034);海南省重点研发项目(Nos.ZDYF2020020,ZDYF2020036);海南省自然科学基金(Nos.519MS051,121QN228);海南省研究生创新科研课题(Nos.Qhys2021-325,hsyx2021-85)。

摘　　要：采用V型腔腔内二倍频和透镜聚焦方式腔外四倍频结构,基于Nd:YVO_(4)准三能级激光系统914 nm基频光级联非线性光学频率变换获得连续波228 nm激光输出。在通常情况下,与脉冲运转方式相比,连续运转激光实现透镜聚焦腔外倍频需要较高的平均功率和较好的光束质量。为了获得较高457 nm连续激光输出性能,理论计算V型腔分臂的长度变化对腔内不同位置光斑大小的影响;实验研究了V型腔不同分臂长度对LD端泵Nd:YVO_(4)/LBO产生457 nm激光输出性能的影响。最终,在泵浦功率为26 W时,获得功率为2.2 W的TEM_(00)模连续波457 nm激光输出,利用I类临界相位匹配BBO晶体对其进行腔外倍频,获得功率为6 mW的228 nm连续波深紫外激光,激光光斑呈椭圆形,一小时内功率稳定性为1.8%。Deep UV laser has very important applications in sterilization,Raman spectroscopy and material processing.In this study,the 914 nm fundamental frequency optical cascade nonlinear optical frequency conversion was realized by the frequency doubling in the V-shaped cavity and Lens focusing method,extracavity quadruple frequency structure,228 nm CW laser was obtained.In general,higher average power and better beam quality were required for the continuous operation laser to achieve the extra-cavity frequency doubling compared with the pulse operation.In order to obtain a higher output performance of 457 nm CW laser,this paper firstly analyzes the influence of the length change of the V-shaped cavity arm on the spot size at different positions in the cavity by theoretical calculation.The effects of different arm lengths of V-cavity on the output performance of 457 nm laser generated by LD end pump Nd:YVO_(4)/LBO was investigated experimentally.Finally,at pump power of 26 W,457 nm CW laser output of 2.2 W,TEM_(00),has been achieved.On the basis of frequency doubling,extra-cavity frequency doubling using Type-I phase matching BBO crystal,was performed,and 228 nm CW DUV laser with 6 mW power has been achieved,the laser spot was elliptic and the power stability was 1.8%within one hour.The pump source is an 808 nm fiber-coupled LD with a core diameter of 400μm and a numerical aperture of 0.22,with maximum CW power of 110 W.The pump light coupling system consists of two plano-convex mirrors with a focal length of 10 mm and a 45°polarizer,and its imaging magnification is close to 1∶1.The parameters of Nd:YVO_(4) crystal are:Nd^(3+)atomic doping concentration is 0.1%;4×4×5 mm^(3) in size;the left facet was antire-flection coated at 808 nm and 1064 nm and high reflection coated at 914 nm;the right facet was antireflection coated at 914 nm,1064 nm and 1342 nm wavelengths.The laser crystal was wrapped in a layer of indium foil on the side and secured on a copper heat sink,which is capable of controlling the temperature thro

关 键 词：激光器 全固态激光器 四倍频 深紫外激光 连续波228 nm激光 

分 类 号：TN248.1[电子电信—物理电子学]