Enhancing sensitivity in atomic force microscopy for planar tip-on-chip probes  

作　　者：H.Tung Ciftci Michael Verhage Tamar Cromwijk Laurent Pham Van Bert Koopmans Kees Flipse Oleg Kurmosikov 

机构地区：[1]Department of Applied Physics,Eindhoven University of Technology,PO Box 513,5600 MB Eindhoven,the Netherlands [2]DRF/RAMIS/SPEC-LEPO,Centre CEA de Saclay,91191 Gif-sr-Vvette,France [3]Institut Jean Lamour,Lorraine University,54000 Nancy,France

出　　处：《Microsystems & Nanoengineering》2022年第3期39-49,共11页微系统与纳米工程（英文）

基　　金：supported by NWO-TTW under project number 14715,by the French PIA under project number ANR-15-DEX-04-LUECAP-MAT,by the"FEDER-FSE Lorraine et Massif Vosges 2014-2020",and by the region Grand Est under the DESOMIN project。

摘　　要：We present a new approach to tuning-fork-based atomic force microscopy for utilizing advanced"tip-on-chip"probes with high sensitivity and broad compatibility.Usually,such chip-like probes with a size reaching 2×2 mm^(2)drastically perturb the oscillation of the tuning fork,resulting in poor performance in its intrinsic force sensing.Therefore,restoring initial oscillatory characteristics is necessary for regaining high sensitivity.To this end,we developed a new approach consisting of three basic steps:tuning-fork rebalancing,revamping holder-sensor fixation,and electrode reconfiguration.Mass rebalancing allows the tuning fork to recover the frequency and regain high Q-factor values up to 10^(4)in air and up to 4×10^(4)in ultra-high vacuum conditions.The floating-like holder-fxation using soft wires significantly reduces energy dissipation from the mounting elements.Combined with the soft wires,reconfigured electrodes provide electrical access to the chip-like probe without intervening in the force-sensing signal.Finally,our easy-to-implement approach allows converting the atomic force microscopy tip from a passive tool to a dedicated microdevice with extended functionality.

关 键 词：tuning ATOMIC utilizing 

分 类 号：TH742[机械工程—光学工程]