低噪声触针式表面粗糙度探测系统及测量不确定度分析  

Evaluation of the Uncertainty for the Measurement of Surface Roughness by Low-noise Probing System

作　　者：史舟淼 张树[2,3] 施玉书 皮磊[2] 胡佳成[1] SHI Zhou-miao;ZHANG Shu;SHI Yu-shu;PI Lei;HU Jia-cheng(China Jiliang University,Hangzhou,Zhejiang 310018,China;National Institute of Metrology,Beijing 100029,China;Shenzhen Institute Technology Innovation,NIM,Shenzhen,Guangdong 518132,China)

机构地区：[1]中国计量大学,浙江杭州310018 [2]中国计量科学研究院,北京100029 [3]深圳中国计量科学研究院技术创新研究院,广东深圳518132

出　　处：《计量学报》2022年第9期1122-1127,共6页Acta Metrologica Sinica

基　　金：国家重点研发项目(2018YFF0212300);质量技术基础能力建设(ANL2003)。

摘　　要：为了提升现有触针式表面粗糙度测量仪的计量能力,从降低仪器噪声水平的角度出发,研制了具有低噪声、无阿贝误差特性的触针式表面粗糙度探测系统。该系统采用样品扫描的方式进行接触测量,利用高精度电容传感器对触针的垂直运动进行实时测量,从而表征被测物的真实微观表面,实现了纳米尺度测量下的低噪声水平。系统使用校准触针式表面粗糙度测量仪的标准样板进行R_(a)测量和不确定度评估,结果表明:对Type C3标准样板测量的扩展不确定度U=2.8 nm(k=2)。In order to improve the measurement capability of the existing stylus surface roughness measuring instrument,from the perspective of reducing the noise level of the instrument,a low noise stylus surface topography probing system has been developed.The probing system uses sample scanning,and uses a high precision capacitive sensor to measure the vertical movement of the stylus,thereby reflecting the true micro-nano topography of the measured surface,and achieves low noise level under nanometer-scale measurement.R_(a) is measured by the instrument standard sample and the uncertainty is evaluated.The results show that the uncertainty is 2.8 nm(k=2)for the Type C3 standard sample.

关 键 词：计量学 表面粗糙度 触针式测量仪 低噪声探测系统 Type C3标准样板 不确定度 

分 类 号：TB921[一般工业技术—计量学]