基于迈克尔逊干涉法的太赫兹波长精密测量  

Research on Precision Measurement Technology of Terahertz Wavelength Based on Interferometry

作　　者：邬佳璐 方波 李剑敏 王震 高艳姣 蔡晋辉 WU Jia-lu;FANG Bo;LI Jian-min;WANG Zhen;GAO Yan-jiao;CAI Jin-hui(College of Metrology and Measurement Engineering,China Jiliang University,Hangzhou,Zhejiang 310018,China;North Electro-Optics Group Co.Ltd,Xi an,Shaanxi 710000,China;Hangzhou Dahua Apparatus Manufacture Co.Ltd,Hangzhou,Zhejiang 311400,China)

机构地区：[1]中国计量大学计量测试工程学院,浙江杭州330018 [2]北方光电集团有限公司,陕西西安710000 [3]杭州大华仪器制造有限公司,浙江杭州311400

出　　处：《计量学报》2022年第9期1147-1153,共7页Acta Metrologica Sinica

基　　金：国家重点研发计划(2018YFF01013005);浙江省新苗人才计划(2021R409042)。

摘　　要：搭建了以迈克尔逊干涉法为基础并引入参考激光作为光程变化度量值的分光路波长测量系统。利用理论分析配合软件仿真的方式研究测量光路中存在的影响因素,以动镜偏转、分束镜偏转和光束偏转导致的相对附加光程差作为评价标准进行分析与判定。测量结果表明:100 GHz的太赫兹源波长为3.1142 mm,相对扩展不确定度为0.9%(k=2)。使用标准太赫兹频率计对同一太赫兹源进行比对实验,获得修正系数为1.0035,从而验证了测量结果的准确性和太赫兹波长测量系统的可靠性。A split-optical wavelength measurement system based on Michelson interferometry and introducing a reference laser as a measure of optical path change is built.Theoretical analysis and software simulation are used to study the influencing factors in the measurement optical path.The relative additional optical path difference caused by the deflection of the moving mirror,the deflection of the beam splitter and the deflection of the beam is used as the evaluation standard for analysis and judgment.The measurement results show that the wavelength of the 100 GHz terahertz source is 3.1142 mm,and the relative extended uncertainty is 0.9%(k=2).A standard terahertz frequency meter is used to conduct a comparison experiment on the same terahertz source,and the correction coefficient is 1.0035,which verified the accuracy of the measurement results and the reliability of the terahertz wavelength measurement system.

关 键 词：计量学 太赫兹波 迈克尔逊干涉法 波长测量 不确定度评定 

分 类 号：TB96[机械工程—光学工程]