高功率密度多结级联905 nm垂直腔面发射激光器  

Multi-junction cascade 905 nm vertical cavity surface emitting lasers with high power density

作　　者：潘冠中 荀孟 赵壮壮 孙昀[1] 蒋文静[1] 周静涛[1] 吴德馨[1] Pan Guan-Zhong;Xun Meng;Zhao Zhuang-Zhuang;Sun Yun;Jiang Wen-Jing;Zhou Jing-Tao;Wu De-Xin(Institute of Microelectronics of Chinese Academy of Sciences,Beijing 100029,China)

机构地区：[1]中国科学院微电子研究所,北京100029

出　　处：《物理学报》2022年第20期90-96,共7页Acta Physica Sinica

基　　金：国家自然科学基金(批准号:62104251,62174178);中国博士后科学基金(批准号:BX20200358,2021M703442);中国科学院前沿科学重点研究计划(批准号:ZDBS-LYJSC031);中国科学院青年创新促进会(批准号:2022115)资助的课题。

摘　　要：本文针对激光雷达等三维传感应用,设计并制备了905 nm波长的高功率密度5结级联垂直腔面发射激光器(vertical cavity surface emitting laser,VCSEL).制备的5结级联VCSEL单管(氧化孔径8μm)的功率转换效率高达55.2%;其最大斜率效率为5.4 W/A,约为相同孔径单结VCSEL的5倍.窄脉冲条件下(脉冲宽度为5.4 ns,占空比0.019%),5结级联19单元VCSEL阵列(单元孔径20μm)的峰值输出功率达到58.3 W,对应的峰值功率密度高达1.62 kW/mm^(2).对不同孔径器件(8—20μm)的光电特性进行了测试和分析.结果显示,这些器件的最大斜率效率均大于5.4 W/A,最大功率转换效率均大于54%.这些高性能VCSEL器件可作为激光雷达等三维传感应用的理想光源.Aiming at three-dimensional(3D)sensing applications such as LiDAR,high power density five-junction cascaded vertical cavity surface emitting lasers(VCSELs)with 905 nm wavelength are designed and fabricated.The maximum power conversion efficiency is 55.2%for an individual VCSEL emitter with 8μm oxide aperture.And the maximum slope efficiency of the device is 5.4 W/A,which is approximately 5 times that of traditional single-junction VCSEL with the same aperture.Under the condition of narrow pulse(pulse width 5.4 ns,duty cycle 0.019%)injection,the peak output power of 19-element array(20μm oxidation aperture for each element)reaches 58.3 W,and the corresponding power density is as high as 1.62 kW/mm^(2).The devices with various apertures(8–20μm)are characterized.The results show that the maximum slope efficiencies of all these devices are greater than 5.4 W/A and the maximum PCE is higher than 54%.These high-performance VCSEL devices can be used as ideal light sources for 3D sensing applications such as LiDAR.

关 键 词：905 nm垂直腔面发射激光器 多结级联 高功率密度 三维传感 

分 类 号：TN248[电子电信—物理电子学]