In_(0.53)Ga_(0.47)As雪崩光电二极管单光子探测器的温度特性研究  

A Study of Temperature Characteristics in In_(0.53)Ga_(0.47)As Single Photon Avalanche Diodes Detector

作　　者：敖天宏 赵江林 童启夏 柳聪 崔大健[1] 张承[1] AO Tianhong;ZHAO Jianglin;TONG Qixia;LIU Cong;CUI Dajian;ZHANG Cheng(Chongqing Optoelectronics Research Institute,Chongqing 400060,CHN)

机构地区：[1]重庆光电技术研究所,重庆400060

出　　处：《半导体光电》2022年第4期765-769,共5页Semiconductor Optoelectronics

摘　　要：In_(0.53)Ga_(0.47)As雪崩光电二极管单光子探测器(SPAD)的响应覆盖短波950~1700nm,具有体积小、灵敏度高等特点,在量子通信、激光测距、激光雷达等应用有广泛前景。工作温度是影响In_(0.53)Ga_(0.47)AsSPAD性能的重要因素,温度越高暗计数率越大,导致器件的噪声也越大。研究器件温度特性是实现暗计数抑制的重要途径。建立了数学模型来提取器件光电性能参数,通过分析吸收层、倍增层中载流子对温度的影响,获得最优器件结构参数。最后,制作了光敏面直径达到70μm的In_(0.53)Ga_(0.47)AsSPAD芯片,并进行了封装测试。结果显示,70μmIn_(0.53)Ga_(0.47)AsSPAD在室温下的探测效率为14.2%,暗计数率为88.6kHz,噪声等效功率为3.82×10^(-16)W·Hz^(-1/2),仿真结果与测试结果的拟合曲线一致。In_(0.53)Ga_(0.47)As single photon avalanche diodes(SPAD)response wavelength of 950~1700 nm.With the advantages of small size and high sensitivity,In_(0.53)Ga_(0.47)As SPADs are widely used in quantum communication,laser ranging and Lidar.Operating temperature is an important factor affecting the performance of In_(0.53)Ga_(0.47)As SPAD.The higher the temperature is,the greater the dark count rate will be,which leads to the greater noise of the device.So the study of temperature characteristics of device can provide important way to suppress dark count.This paper built a mathematical model to extract photoelectric parameters.By analyzing the influence of charge carriers in absorber layer and multiplication layer,optimized structure parameters were obtained.Finally,an In_(0.53)Ga_(0.47)As SPAD chip with a photosensitive surface diameter of 70μm was fabricated,packaged and tested.The results show that the detection efficiency reaches 14.2%,the dark counting 88.6 kHz and the NEP 3.82×10^(-16)W·Hz^(-1/2).The test results agree with the simulation.

关 键 词：In_(0.53)Ga_(0.47)As SPAD 温度特性 短波红外探测器 激光雷达 

分 类 号：TN958.98[电子电信—信号与信息处理]