非球面光学表面缺陷检测技术现状和发展趋势(特邀)  

Current situation and development trend of aspheric optical surface defect detection technology(invited)

作　　者：李明泽 侯溪[1] 赵文川[1] 王洪 李梦凡 胡小川 赵远程 周杨 Li Mingze;Hou Xi;Zhao Wenchuan;Wang Hong;Li Mengfan;Hu Xiaochuan;Zhao Yuancheng;Zhou Yang(Institute of Optics and Electronics,Chinese Academy of Sciences,Chengdu 610209,China;University of Chinese Academy of Sciences,Beijing 100049,China)

机构地区：[1]中国科学院光电技术研究所,四川成都610209 [2]中国科学院大学,北京100049

出　　处：《红外与激光工程》2022年第9期1-20,共20页Infrared and Laser Engineering

摘　　要：非球面光学元件具有更大的自由度和灵活性,广泛应用在航空航天、微电子装备、光学精密测量、激光光学等诸多领域。光学元件表面缺陷将影响光学系统性能,而表面缺陷控制需要相应检测手段,高分辨率、高精度、高效率光学表面缺陷检测仍存在技术挑战。文中综述了光学元件表面缺陷类别、评价标准及检测方法,重点探讨了非球面光学元件表面缺陷检测技术及其应用范围,分析比较了各种方法的优缺点,最后对表面缺陷检测技术发展趋势进行了展望。Aspheric optical elements have greater freedom and flexibility,and are widely used in aerospace,microelectronic equipment,optical precision measurement,laser optics and many other fields.The surface defects of optical elements will affect the performance of optical systems,and the control of surface defects requires corresponding detection methods.There are still technical challenges in the detection of optical surface defects with high resolution,high accuracy and high efficiency.This paper summarizes the types,evaluation standards and detection methods of surface defects of optical elements,focuses on the surface defect detection technology of aspheric optical elements and its application range,analyzes and compares the advantages and disadvantages of various methods,and finally prospects the development trend of surface defect detection technology.

关 键 词：缺陷检测 表面缺陷 非球面光学元件 条纹反射法 

分 类 号：TN247[电子电信—物理电子学]