多环谐振微陀螺性能参数的有限元计算  

Finite Element Method for Performance Parameters of Disk Resonator Gyroscope

作　　者：卢浩琳 张卫平[1,2] 谷留涛 冯军 LU Haolin;ZHANG Weiping;GU Liutao;FENG Jun(National Key Laboratory of Science and Technology on Micro/Nano Fabrication,Shanghai Jiao Tong University,Shanghai 200240;School of Electronic and Electrical Engineering Department of Micro/Nano Electronics,Shanghai Jiao Tong University,Shanghai 200240)

机构地区：[1]上海交通大学微米纳米加工技术国家级重点实验室,上海200240 [2]上海交通大学电子信息与电气工程学院微纳电子学系,上海200240

出　　处：《飞控与探测》2022年第4期76-81,共6页Flight Control & Detection

基　　金：国家自然科学基金(61574093);国家重点实验室基金(614280504010317);上海市专业技术服务平台资助(19DZ2291103);上海航天技术研究院-上海交大航天先进技术联合研究中心自主项目(USCAST2016-5)。

摘　　要：多环谐振陀螺是目前最具发展前景的MEMS陀螺之一,如何快速对多环谐振陀螺进行参数优化设计已成为研究热点。从多环谐振陀螺的基本结构出发,通过理论研究,发现影响机械灵敏度和机械热噪声的主要结构参数为陀螺的谐振频率、有效质量、角度增益以及品质因子。使用COMSOL和MATLAB等软件搭建了有限元计算平台,实现了对上述性能参数的有限元仿真求解,为研究环形谐振陀螺结构的性能参数和优化设计提供了有力的软件仿真工具,并且可以推广应用到其他陀螺器件的研究中。Disk resonator gyroscope(DRG)is one of the most promising MEMS gyroscopes.How to quickly optimize the parameters of DRG has become a research hotspot.In this paper,based on the basic structure of the DRG and theoretical research,it is found that the main structural influence parameters of mechanical sensitivity and mechanical thermal noise are the resonant frequency,effective mass,angular gain and quality factor of the gyroscope.The finite element calculation platform is built by using COMSOL and MATLAB software to realize the finite element simulation of the above performance parameters,which provides a powerful software simulation tool for the research of performance parameters and optimization design of DRG and the simulation methods can be widely used on other gyroscope devices.

关 键 词：多环谐振微陀螺仪 有限元(FEM) 谐振频率 角度增益 有效质量 

分 类 号：U666.1[交通运输工程—船舶及航道工程]