基于单目偏折术的半球谐振子面域振型测量  

Areal Measurement of Vibration Modes of Hemispherical Shell Resonator by Deflectometry

作　　者：朱睿 张祥朝[1] 李绍良 赵万良 陈雨诺 郎威 徐敏[1] ZHU Rui;ZHANG Xiangchao;LI Shaoliang;ZHAO Wanliang;CHEN Yunuo;LANG Wei;XU Min(Shanghai Engineering Research Center of Ultra-Precision Optical Manufacturing,Fudan University,Shanghai 200438;Shanghai Aerospace Control Technology Institute,Shanghai 201109;Shanghai Engineering Research Center of Inertia,Shanghai 201109)

机构地区：[1]复旦大学上海超精密光学制造工程技术研究中心,上海200438 [2]上海航天控制技术研究所,上海201109 [3]上海惯性工程技术研究中心,上海201109

出　　处：《飞控与探测》2022年第4期82-87,共6页Flight Control & Detection

基　　金：上海航天科技创新基金(SAST2019-086);国家自然科学基金(51875107)。

摘　　要：针对半球谐振子振型的高精度面域测量难题,提出了一种基于单目偏折测量术的测量方法。将半球谐振子振型测量转换为法向摆动角度测量,并基于逆向光线追迹对振型测量系统进行设计。在图像中提取振动拉长模糊斑的基础上,基于图像解卷积计算斑点摆动轨迹,并将其转换为法向分别在经纬方向上的摆动角度,进而拟合得到半球谐振子振型的相关参数。实验结果表明,该方法可实现半球谐振子振型的高精度拟合,对振幅和法向摆角的测量分辨率分别可达10nm与10μrad。与传统振动测量方法相比,该方法结构简单灵活、抗干扰能力强,具有广阔的应用前景。High precision and areal measurement of the vibration modes of hemispheric shell resonator(HSR)is of great challenge.A novel measurement method is developed based on deflectometry.The measurement of vibration modes of HSR is converted into the measurement of swing angles of normal vectors.By the reverse ray tracing,a measurement system is designed.On the basis of the captured images of blurred spots,the swing angles of the normal vectors are decomposed into the latitude and longitude directions.Then,the parameters of vibration modes of HSR are calculated accordingly.Experimental results show that the method can achieve precise fitting of the vibration modes.The detecting sensitivities against the vibration amplitude and swing angle of the normal vector are 10nm and 10μrad,respectively.This measurement method has the advantages of simple and flexible structure and superior capability of anti-disturbance,thus it can find wide applications in various fields.

关 键 词：偏折测量技术 半球陀螺谐振子 驻波振动 振动测量 

分 类 号：O439[机械工程—光学工程] TH741[理学—光学]