空间行波管专用排气工艺极高真空系统的研制  

Development of XHV System for Customized Vacuum Exhaust Process for Space TWTs

作　　者：卢少波 姚铮 宋艳鹏 韩永超 张吉峰 唐榕 LU Shao-bo;YAO Zheng;SONG Yan-peng;HAN Yong-chao;ZHANG Ji-feng;TANG Rong(Beijing Vacuum Electronic Technology Co.,Ltd.,Beijing 100015,China)

机构地区：[1]北京真空电子科技有限公司,北京100015

出　　处：《真空》2022年第5期50-54,共5页Vacuum

摘　　要：空间行波管广泛应用于通信卫星、雷达卫星和定位导航等领域,极高真空的获得与维持是空间行波管高可靠性和长寿命的关键,因此研究极高真空烘烤排气系统具有重要意义。极高真空的获得需要在专用真空排气设备上进行,真空排气工艺是微波真空电子器件制造工艺中最重要的一种技术。极高真空的获得和维持涉及多种技术,包含材料的选择、真空室的设计、真空泵的选择、极高真空的获得和测量、真空除气、高灵敏度真空检漏技术和残余气体分析技术等。本文介绍了空间行波管极高真空系统工艺设备研制过程及其在科研生产中的应用。该真空系统实现了空载真空度优于1×10^(-9)Pa,多路带载真空度优于5×10^(-9)Pa,对超高真空、极高真空的获得和真空排气设备制造工艺及应用等具有一定的参考价值。Space TWTs are widely used in communication satellite,radar satellite,positioning and navigation and other fields.The acquisition and maintenance of extra high vacuum is the key to the high reliability and long life of space TWTs.The extra high vacuum(XHV)of TWTs needs to be obtained on special vacuum exhaust equipment.Vacuum exhaust system is the most important process in the manufacturing process of micro-wave vacuum electronic devices.The acquisition and maintenance of XHV involves a variety of vacuum related technologies,including the choice of materials,the optimized design of vacuum chamber,vacuum pump selection,acquisition and measurement of extra high vacuum,vacuum degassing technology,high sensitive vacuum leak detection and residual gas analysis technology.This paper introduces the development process of space TWTs extra high vacuum system equipment and its application in scientific research and production.The vacuum system realizes that the no-load vacuum degree is better than 1×10^(-9)Pa,and the multi-channel load vacuum degree is better than 5×10^(-9)Pa,which has a certain reference value for the acquisition of ultrahigh vacuum and extra high vacuum,and the manufacturing process and application of vacuum exhaust equipment.

关 键 词：极高真空 空间行波管 真空排气 出气速率 

分 类 号：TB751[一般工业技术—真空技术]