大量程光谱共焦位移传感器设计及性能评估  

Design and Performance Evaluation of Chromatic Confocal Displacement Sensor with High Measuring Range

作　　者：邵谭彬 郭文平[1] 席英皓 刘子聿 杨克成[1] 夏珉[1] Shao Tanbin;Guo Wenping;Xi Yinghao;Liu Ziyu;Yang Kecheng;Xia Min(School of Optical and Electronic Infororation,Huazhong University of Science and Technology,Wuhan 430074,Hubei,China)

机构地区：[1]华中科技大学光学与电子信息学院,湖北武汉430074

出　　处：《中国激光》2022年第18期56-63,共8页Chinese Journal of Lasers

摘　　要：现有的光谱共焦色散物镜存在测量量程小的问题,在工业检测中的应用受到较大的限制。针对这一问题,采用四片球面透镜设计了一种大量程的色散物镜,在500~700 nm波段内,测量量程达到9.962 mm。在大色差的情况下对球差进行了优化,并利用设计的色散物镜搭建了光谱共焦位移测量系统,开展了性能评估实验。实验结果表明,系统实现了10 mm的测量范围,测量标准差为0.5μm,平均绝对误差为0.6μm。另外,对不同材料的样品进行了测量,结果表明,系统对不同材料样品具有一定的适应性。该设计实现了较大的测量范围,可以满足各类复杂对象的工业检测需求。Objective The development of precision manufacturing puts forward higher requirements for surface flaw detection technology in industrial testing.Because precision devices are easy to scratch,the contact measurement technology based on mechanical probe is no longer suitable for the detection needs of such devices,while the non-contact measurement technology based on optical method begins to highlight its advantages.At present,the commonly used high-precision displacement sensor includes the laser triangle ranging sensor.It has the advantages of simple structure and convenient operation,but the measurement accuracy is influenced by the size and shape of the light spot,environmental light and other factors.Besides,the laser triangle ranging sensor depends on its sample surface scattering light,so it is not suitable for the measurement of high reflection and inclined surface.The chromatic confocal technology has the advantages of high resolution and insensitivity to surface texture,tilt,stray light and other factors,so it is more suitable for the detection needs of precision devices.In order to meet the requirement of a large measurement range in industrial testing,we design a large-range dispersion objective lens.In order to reduce the cost,a traditional spherical lens is adopted.We design a four-piece objective lens and optimize the aberration using the Zemax software.A chromatic confocal displacement measurement system is built with the designed dispersive objective lens.Experiments are designed and carried out to evaluate the displacement measurement error of the system and the measurement performance on different material samples.The results show that the system has certain adaptability to different material samples.Methods A dispersion objective lens is designed by using the traditional spherical lens.According to the linear dispersion condition,we choose suitable materials,compute the initial structure of the objective lens,and then use the Zemax software to optimize the spherical aberration,dispersion range,

关 键 词：测量 无损检测 位移传感器 光谱共焦 色散 

分 类 号：TH741[机械工程—光学工程]