ZnCdS∶Mn/ZnS量子点在硅基紫外探测器中的应用  

Application of ZnCdS:Mn/ZnS Quantum Dots in Silicon-Based Ultraviolet Detectors

作　　者：周祥燕 项文斌 陈埇稷 袁玉芬 崔一平[1] 张家雨[1] Zhou Xiangyan;Xiang Wenbin;Chen Yongji;Yuan Yufen;Cui Yiping;Zhang Jiayu(School of Electronic Science&Engineering,Southeast University,Nanjing 210096,Jiangsu,China;The Military Representative Office of the Chinese People’s Liberation Army Armament Department in Wuxi,Wuxi 214000,Jiangsu,China)

机构地区：[1]东南大学电子科学与工程学院,江苏南京210096 [2]中国人民解放军陆军装备部驻无锡地区军事代表室,江苏无锡214000

出　　处：《激光与光电子学进展》2022年第17期65-70,共6页Laser & Optoelectronics Progress

基　　金：江苏省科学技术厅产业前瞻与共性关键技术项目(BE2018117)。

摘　　要：硅基探测器具有稳定可靠、暗电流低、响应度高、价格低廉等优点,被广泛应用于光电探测等领域。针对硅基探测器在紫外波段探测能力有限的问题,设计了一款可增强硅基探测器在紫外波段探测能力的聚光结构。首先,利用ZnCdS∶Mn/ZnS量子点的荧光特性将吸收的紫外光转化为可见光。然后,配合短波通截止滤色膜使探测器在260~400 nm波段的外量子效率均大于20%,响应时间限制在ms量级,暗电流限制在pA量级。实验结果表明,使用量子点层的聚光结构能明显改善硅基探测器在紫外波段的探测能力,通过改变量子点的尺寸还可以在紫外波段实现探测范围可调的硅基探测器。Siliconbased detector has the advantages of stability and reliability,low dark current,high response and low price.It is widely used in photoelectric detection and other fields.In view of the limited detection ability of siliconbased detector in the ultraviolet band,a concentrating structure which can enhance the detection ability of siliconbased detector in the ultraviolet band is designed in this paper.First,the absorbed ultraviolet light is transformed into visible light by using the fluorescence characteristics of ZnCdS∶Mn/ZnS quantum dots.Then,combined with the short wave pass cutoff color filter film,the external quantum efficiency of the detector in the 260-400 nm band is greater than 20%,the response time is limited to the order of ms,and the dark current is limited to the order of pA.The experimental results show that the focusing structure of quantum dots layer can significantly improve the detection ability of siliconbased detector in the ultraviolet band.In addition,the siliconbased detector with adjustable detection range can be realized in the ultraviolet band by changing the size of quantum dots.

关 键 词：探测器 外量子效率 掺杂量子点 短波通截止滤色膜 

分 类 号：O436[机械工程—光学工程]