计算机辅助光学偏折测量技术研究进展  

Review of Research on Computer-Aided Deflectometric Measurement Technology

作　　者：吴振东 王道档 阮旸 梁荣光 Wu Zhendong;Wang Daodang;Ruan Yang;Liang Rongguang(College of Metrology and Measurement Engineering,China Jiliang University,Hangzhou 310018,Zhejiang,China;James C.Wyant College of Optical Sciences,University of Arizona,Tucson 85721,Arizona,USA)

机构地区：[1]中国计量大学计量测试工程学院,浙江杭州310018 [2]亚利桑那大学光学科学学院,亚利桑那图森85721

出　　处：《光学学报》2022年第17期165-180,共16页Acta Optica Sinica

基　　金：浙江省自然科学基金(LY21E050016)。

摘　　要：光学偏折测量技术作为高精度的非接触式测量方式,可在不损伤被测元件表面的同时,具有较高的空间分辨率和较大的测量动态范围。光学偏折测量系统结构简单,在现今越来越注重高精度、高效率和高通用性的光学复杂自由曲面测量领域中有较好的应用前景。首先,回顾了近年来的复杂曲面测量方法,并分析其测量特点。然后,着重介绍了采用计算机辅助的光学偏折测量技术及其系统关键性能参数。接着,对光学偏折测量所涉及的测量模型的建立、结构误差的校正、相位的获取和曲面的重构等关键技术的研究进展进行了讨论。最后,总结了基于计算机辅助的光学偏折测量技术的几种典型应用。As a high-precision non-contact measurement method,the deflectometric measurement technology can achieve the testing without damaging the surface of the measured components,and it has a high spatial resolution and a large dynamic range.The deflectometric measurement system is simple in configuration,and it has a good application prospect in the field of complex optical freeform surface measurement,which requires high precision,high efficiency,and high versatility.This paper firstly reviews the complex surface measurement methods in recent years and analyzes the corresponding measuring characteristics.Then,it focuses on the introduction to the computer-aided deflectometric measurement technology and the key performance parameters in the computer-aided deflectometric measurement system.After that,the research progress in the key techniques in the deflectometric measurement is discussed,including the measurement model construction,geometrical error calibration,phase acquisition,and surface reconstruction.Finally,the typical applications of computer-aided deflectometric measurement technology are summarized.

关 键 词：测量 光学偏折术 光学检测 大动态范围 计算机辅助测量 

分 类 号：TH741[机械工程—光学工程]