熔石英元件紫外脉冲激光辐照损伤特性研究进展综述  

Review of Research Progress on Damage Characteristics of Fused Silica Optics under Ultraviolet Pulsed Laser Irradiation

作　　者：杨李茗[1] 黄进[1] 刘红婕[1] 王凤蕊[1] 耿峰[1] 孙来喜[1] 韩伟[1] 丁磊[1] 廖威[1] 蒋晓东[1] Yang Liming;Huang Jin;Liu Hongjie;Wang Fengrui;Geng Feng;Sun Laixi;Han Wei;Ding Lei;Liao Wei;Jiang Xiaodong(Research Center of Laser Fusion,China Academy of Engineering Physics,Mianyang 621900,Sichuan,China)

机构地区：[1]中国工程物理研究院激光聚变研究中心,四川绵阳621900

出　　处：《光学学报》2022年第17期271-293,共23页Acta Optica Sinica

摘　　要：熔石英光学元件在高能量密度的紫外脉冲激光辐照下往往极易出现后表面损伤,这严重影响了紫外高功率脉冲激光装置的可靠性。综合国内外相关研究进展,系统阐述了熔石英元件表面在高能量紫外脉冲激光辐照下的损伤特性,包括典型的初始损伤和损伤增长行为特征,介绍了熔石英元件表面缺陷的类型、分布特性和紫外脉冲激光诱导损伤的内在机制,并概述了常用的熔石英表面加工方法与缺陷控制技术。最后,介绍了熔石英表面缺陷无损检测新技术和抗损伤性能测试技术方面的研究进展。Fused silica optics are highly susceptible to rear-surface damage under irradiation by ultraviolet pulsed laser with high energy density,which seriously affects the reliability of high-power ultraviolet pulsed laser facilities.Comprehensively analyzing the related research progress in China and abroad,this paper systematically expounds the damage characteristics of the surface of fused silica optics under high-energy ultraviolet pulsed laser irradiation,including typical initial damage and characteristics of damage growth behaviors.Subsequently,it outlines the types and distribution characteristics of the defects on the surface of fused silica optics,and the intrinsic mechanism of damage induced by ultraviolet pulsed laser.Then,commonly used surface processing methods and defect control technologies for fused silica are summarized.Finally,an overview of the research progress on new non-destructive detection technologies for defects on the surface of fused silica and damage-resistant performance testing technologies is presented.

关 键 词：激光光学 熔石英元件 紫外脉冲激光 缺陷 后表面损伤 

分 类 号：O437[机械工程—光学工程]