Structure and Optical Properties of ZnO Thin Films Prepared by the Czochralski Method  

作　　者：MA Zhanhong REN Fengzhang YANG Zhouya 马战红;任凤章;YANG Zhouya(School of Materials Science and Engineering,Henan University of Science and Technology,Luoyang 471023,China;Provincial and Ministerial Co-construction of Collaborative Innovation Center for Non-ferrous Metal New Materials and Advanced Processing Technology,Luoyang 471023,China)

机构地区：[1]School of Materials Science and Engineering,Henan University of Science and Technology,Luoyang,471023,China [2]Provincial and Ministerial Co-construction of Collaborative Innovation Center for Non-ferrous Metal New Materials and Advanced Processing Technology,Luoyang,471023,China

出　　处：《Journal of Wuhan University of Technology(Materials Science)》2022年第5期823-828,共6页武汉理工大学学报（材料科学英文版）

基　　金：Funded by Henan International Science and Technology Cooperation Program (No.152102410035);Ph D Research Startup Foundation of Henan University of Science and Technology(No.13480107)。

摘　　要：The zinc oxide seed film was coated on conductive glass (FTO) substrate by the Czochralski method,Zinc acetate and hexamethylenetetramine were used as raw materials to prepare growth solution,and then ZnO film was prepared by a low-temperature solution method.The effects of annealing temperature on the morphology,structure,stress and optical properties of ZnO films were studied.The thin films were characterized by X-ray diffraction (XRD),scanning electron microscopy (SEM),UV-visible absorption spectra (UV-vis),photoluminescence (PL) and X-ray photoelectron spectroscopy (XPS).The results show that the films are ZnO nanorods.With the increase of annealing temperature,the diameter of the rod increases,and the nanorods tend to be oriented.The band gap of the sample obtained from the light absorption spectra first increases and then decreases with the increase of annealing temperature.When the annealing temperature is 350 ℃,the crystallinity of zinc oxide film is the highest,the band gap is close to the theoretical value of pure ZnO.

关 键 词：Czochralski method ZnO film annealing temperature optical properties MICRO-MORPHOLOGY internal stress 

分 类 号：TN304.055[电子电信—物理电子学] TQ132.41[化学工程—无机化工] TB383.2[一般工业技术—材料科学与工程]