基于线光的表面粗糙度测量研究  

Research on Measurement of Surface Roughness Based on Line Light

作　　者：商执亿 王建华[1] 尹培丽[1] SHANG Zhiyi;WANG Jianhua;YIN Peili(School of Mechatronic Engineering,Xi'an Technological University,Xi'an 710021;School of Mechatronic Engineering,Xi'an Polytechnic University,Xi'an 710048)

机构地区：[1]西安工业大学机电工程学院,西安710021 [2]西安工程大学机电工程学院,西安710048

出　　处：《舰船电子工程》2022年第9期160-163,共4页Ship Electronic Engineering

基　　金：陕西省科技重大专项(编号:2019zdzx01-02-02);陕西省教育厅专项科研计划项目(编号:21JK0692)资助。

摘　　要：表面粗糙度是评价机械加工表面质量的重要指标,而在众多的表面粗糙度测量方法中,线激光法和线光谱共焦法因其非接触、工作距离大、且同属线光测量,效率高等优点,有着广阔的应用前景。论文首先分析了两种线光方法的测量原理,其次推导了表面粗糙度高度参数的计算方法,最后采用这两种方法完成了刨床样块和平磨样块的表面粗糙度测量实验。实验以触针法的结果作为参考标准,并从轮廓曲线和轮廓算数平均偏差Ra两个方面进行对比分析,结果表明:线光谱共焦法能够准确测量Ra≥0.2μm样块的表面粗糙度,而线激光法能够准确测量Ra≥3.2μm样块的表面粗糙度,两种方法可以应用于不同粗糙度测量要求的场合。Surface roughness is an important index to evaluate the quality of machined surface. Among many surface roughness measurement methods,line laser method and line spectral confocal method have wide application prospects because of their non-contact,large working distance,and high efficiency of line light measurement. In this paper,measurement principles of the two line light methods are analyzed,and calculation method of surface roughness height parameter is deduced. Finally,surface roughness measurement experiments of planing and flat grinding specimens are performed. The results of stylus method are used as reference standard,and the results are analyzed from two aspects of profile curve and profile arithmetic mean deviation Ra. The results indicated that line spectral confocal method could accurately measure the specimens for Ra ≥ 0.2μm,and line laser method could accurately measure the specimens for Ra ≥ 3.2μm. The two line light methods can meet the requirements of different roughness measurement.

关 键 词：表面粗糙度 线激光 线光谱共焦 触针法 线光 

分 类 号：TN247[电子电信—物理电子学]