话说微电子工业洁净室的节能(1)——合理确定洁净室设计参数  

Discussion on energy conservation measures of cleanrooms in microelectronics industry(1)—Reasonable determination of cleanroom parameters

作　　者：涂光备[1] 涂有 Tu Guangbei;Tu You(Tianjin University,Tianjin;Tianjin Ren'ai College,Tianjin)

机构地区：[1]天津大学,天津 [2]天津仁爱学院,天津

出　　处：《暖通空调》2022年第11期42-49,共8页Heating Ventilating & Air Conditioning

摘　　要：经历了50多年的创业,中国的微电子工业获得巨大发展,相关从业人员得到培训和锻炼,为继续提高质量、补全短板创建了基础。降低能耗、提高能效是发展微电子工业的重要方面。本文从合理确定洁净室设计参数方面漫谈了些许经验;就合理降低洁净室的送风量,创建局部净化等洁净微环境以缩减高洁净要求的面积,改善局部排风效果、减少空气渗漏,以及合理确定洁净室内的温湿度参数等问题提出了一些建议。After more than 50 years of development,China s microelectronics industry has earned great achievement.The training of relevant practitioners has created the foundation for continuously quality improvement and shortcoming complement.Improving energy efficiency and conservation have become important aspects of the microelectronics industry development.In this paper,some experiences are provided on reasonable determination of cleanroom parameters.Some suggestions are put forward on reasonably reducing the air supply rate of the cleanrooms,creating the partial clean microenvironment to reduce the area required for high cleanliness level,improving the local exhaust effect,reducing air leakage,and reasonably determining the temperature and humidity parameters in the cleanrooms.

关 键 词：微电子工业 洁净室 节能 微环境 局部排风 正压控制 室内参数 

分 类 号：TU834.8[建筑科学—供热、供燃气、通风及空调工程]