聚焦离子束快速精准制备玻璃透射电镜样品  

Fast and Precise FIB TEM Sample Preparation from Glass Materials

作　　者：丁莹 史学芳 杨修波 郑岚 高翔宇 刘峰 DING Ying;SHI Xuefang;YANG Xiubo;ZHENG Lan;GAO Xiangyu;LIU Feng(Analytical and Testing Center,Northwestern Polytechnical University,Xi’an 710072,China;State Key Laboratory of Solidification Processing,Northwestern Polytechnical University,Xi’an 710072,China)

机构地区：[1]西北工业大学分析测试中心,西安710072 [2]西北工业大学凝固技术国家重点实验室,西安710072

出　　处：《实验室研究与探索》2022年第8期31-34,共4页Research and Exploration In Laboratory

摘　　要：为了解决受荷电效应影响导致玻璃类绝缘样品加工难的问题,提出了改进聚焦离子束常规制备透射电镜样品的方法。改进的方法主要是在制备过程中引入电子束辅助沉积和机械手辅助切割,并搭配合理的离子束加工束流。其中,电子束辅助沉积可以帮助操作人员在因荷电效应而模糊不清的图像中迅速且精准地找到关键区;机械手辅助切割可通过建立更好的电荷接地通道来减弱切割过程中材料表面的荷电现象;合理的离子束加工束流则是为了平衡荷电效应和加工速率之间的矛盾。结果表明,改进后的方法能够在保证加工速率的前提下,有效改善材料表面的荷电现象,实现离子束对玻璃材料的快速精准加工,获得良好的透射电镜样品。Glass materials suffer from severe charging effects during the FIB processing.To overcome this problem,the conventional FIB TEM sample preparation method was improved with the electron beam assisted deposition,nanomanipulator is assisted to processing and reasonable ion beam current control.Among these,the electron beam assisted deposition can help locate the range of interest quickly in fuzzy views.The nanomanipulator assisted processing can reduce charging effects by establishing better charge grounding path.While the reasonable ion beam current control is used to make a balance between charging effects and processing efficiency.Results show that the improved method can effectively reduce charging effects on the premise of processing efficiency,and is approved to be a good way to apply fast and precise TEM sample preparation for glass materials.

关 键 词：聚焦离子束 电子束辅助 机械手辅助 绝缘材料 透射电镜样品 

分 类 号：TB32[一般工业技术—材料科学与工程]