一种基于微波法珀谐振腔的高精度位移传感器  

A high precision displacement sensor based on microwave Fabry-Perot resonant cavity

作　　者：赵刚 马畅 张琦 陈静 向芸芸 王一燚 ZHAO Gang;MA Chang;ZHANG Qi;CHEN Jing;XIANG Yunyun;WANG Yiyi(Xinjiang Fukang Pumped Storage Co Ltd,Fukang 831500,China;Key Laboratory of Specialty Fiber Optics and Optical Access Networks,School of Communication and Information Engineering,Shanghai University,Shanghai 200444,China)

机构地区：[1]新疆阜康抽水蓄能有限公司,新疆阜康831500 [2]上海大学通信与信息工程学院特种光纤与光接入网重点实验室,上海200444

出　　处：《传感器与微系统》2022年第11期105-108,共4页Transducer and Microsystem Technologies

摘　　要：提出了一种基于微波谐振原理的高精度位移传感器。位移传感器由内导体、外导体、第一反射点、第二反射点和谐振腔构成。两个高反射点构成谐振腔,位移变化改变了谐振腔的腔长,进而改变了谐振波长和谐振频率,通过测量谐振波长大小即可确定位移。此外,弹簧和顶珠结构使得位移在缓慢变化过程中,传感器可达到全量程没有跳数。实验结果表明:在30 mm量程范围内,传感器分辨率1μm,谐振波长变化量与位移的比值为-1.9287。同时研究了位移传感器的温度影响。传感器具有机械鲁棒性强、低温度依赖性、低成本、高精度等优点。A high-precision displacement sensor based on microwave resonance principle is proposed.The displacement sensor consists of an inner conductor, an outer conductor, the first reflection point, the second reflection point and a resonant cavity.Two high reflection point form the resonant cavity.The displacement variation changes the cavity length of the resonator cavity, and then changes the resonant wavelength and frequency.The displacement can be determined by measuring the resonant wavelength, in addition, thanks to the design of spring and steel ball structure make the sensor continuous without jumping points in the full measurement range in the process of slow displacement change.The experimental results show that the sensor has a resolution of 1 μm in the range of 30 mm, and the ratio of the variation of resonance wavelength to the displacement is-1.928 7.The temperature effect of the displacement sensor is also studied.This new type of microwave displacement sensor has the advantages of robust structure, low temperature dependence, low cost and high precision.

关 键 词：位移传感器 谐振腔 内外导体 反射点 谐振波长 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TN606[自动化与计算机技术—控制科学与工程]