Piezoelectric bimorph MEMS speakers  

作　　者：Yiming Lang Chengze Liu Ahmed Fawzy Chen Sun Shaobo Gong Menglun Zhang 

机构地区：[1]State Key Laboratory of Precision Measuring Technology and Instruments,Tianjin University,Tianjin 300072,China [2]Nanotechnology Central Lab,Electronics Research Institute(ERI),Cairo 12622,Egypt

出　　处：《Nanotechnology and Precision Engineering》2022年第3期1-8,共8页纳米技术与精密工程（英文）

基　　金：This work was supported by the funding from Natural Science Foundation of China(Grant No.62001322);the National Key Research and Development Program(Grant No.2020YFB2008800);the Nanchang Institute for Microtechnology of Tianjin University.

摘　　要：One of the key requirements for MEMS speakers is to increase the sound pressure level(SPL)while keeping the size as small as possible.In this paper we present a MEMS speaker based on piezoelectric bimorph cantilevers that produces a higher SPL than conventional unimorph cantilever speakers.The active diaphragm size is 1.4×1.4 mm^(2).The bimorph cantilevers are connected in parallel to make full use of the actuation voltage.At 1 kHz,the measured SPL reached 73 dB and the peak SPL reached 102 dB at the resonance frequency of 10 kHz in a 711 ear simulator under a driving voltage of 10 V_(rms).The total harmonic distortion of the MEMS speaker was less than 3%in the range from 100 Hz to 20 kHz.Although the absolute SPL was not the highest,this work provides a better SPL for all piezoelectric MEMS speakers.

关 键 词：PIEZOELECTRIC Microspeaker BIMORPH Aluminum nitride 

分 类 号：TN643[电子电信—电路与系统]