Design of interdigitated transducers for acoustofluidic applications  

作　　者：Shuren Song Qi Wang Jia Zhou Antoine Riaud 

机构地区：[1]State Key Laboratory of ASIC and System,School of Microelectronics,Fudan University,Shanghai,People’s Republic of China

出　　处：《Nanotechnology and Precision Engineering》2022年第3期36-54,共19页纳米技术与精密工程（英文）

基　　金：This work was supported by the National Natural Science Foundation of China under Grant Nos.12004078 and 61874033;the State Key Lab of ASIC and Systems,the Science and Technology Commission of Shanghai Municipality Award/Grant Nos.22QA1400900 and 22WZ2502200;Fudan University 2021MS001,2021MS002 and 2020KF006.

摘　　要：Interdigitated transducers(IDTs)were originally designed as delay lines for radars.Half a century later,they have found new life as actuators for microfluidic systems.By generating strong acoustic fields,they trigger nonlinear effects that enable pumping and mixing of fluids,and moving particles without contact.However,the transition from signal processing to actuators comes with a range of challenges concerning power density and spatial resolution that have spurred exciting developments in solid-state acoustics and especially in IDT design.Assuming some familiarity with acoustofluidics,this paper aims to provide a tutorial for IDT design and characterization for the purpose of acoustofluidic actuation.It is targeted at a diverse audience of researchers in various fields,including fluid mechanics,acoustics,and microelectronics.

关 键 词：Acoustic field Surface acoustic wave TRANSDUCER Finite-element analysis SIMULATION Acoustical properties LAB-ON-A-CHIP Acoustic wave attenuation 

分 类 号：TB552[理学—物理]