二维动态显微镜的光学系统设计  

Design of 2-D Dynamic Photoelectric Microscope

作　　者：路雨桐 冯大伟 向阳[1] 刘永坤 吕思航 LU Yutong;FENG Dawei;XIANG Yang;LIU Yongkun;LV Sihang(School of Optoelectronic Engineering,Changchun University of Science and Technology,Changchun 130022)

机构地区：[1]长春理工大学光电工程学院,长春130022

出　　处：《长春理工大学学报（自然科学版）》2022年第5期38-43,共6页Journal of Changchun University of Science and Technology(Natural Science Edition)

基　　金：国家重点项目研发计划(2017YFF0204803)。

摘　　要：光电显微镜可实现线纹的自动对准,消除人工测量的主观性误差,具有速度快、效率高、重复性好、精度高的特点。为实现二维线纹的溯源测量,完成对十字刻线、圆形线纹等二维线纹的高分辨率瞄准,在一维动态光电显微镜的基础上,设计了应用于比长仪的二维动态光电显微镜光学系统,包括:物镜成像系统、照明系统、观察系统、分光系统。系统采用物方远心光路,消减由于物平面位置不准确所引起的测量误差;为适应不同线宽、线间距及特殊形状的线纹样板,设计结果:β=5倍、10倍、20倍,工作距5~20 mm,物方线视场2y=0.2 mm,数值孔径NA=0.2,传递函数接近衍射极限。The photoelectric microscope can realize the automatic alignment of line scales and eliminate the subjective error of manual measurement. It has the characteristics of high speed,high efficiency,good repeatability and high precision. In order to realize the traceable measurement of 2-D line scale temples and finish the high resolution aim at the crosswire and circle pattern,on the basis of 1-D dynamic photoelectric microscope,the optical system of two-dimensional dynamic photoelectric microscope used in Abbe comparator is designed,including microscopic imaging system,lighting system,observation system and optical splitting system. The measurement error caused by the inaccurate position of the object plane is reduced by using the object telecentric light path. In order to adapt to different line width,line spacing and special shape line pattern,the system results are β=5,10,20,working distance=5~20 mm,numerical aperture NA=0.2,the object side view 2y=0.2 mm and transfer function is close to the diffraction limit.

关 键 词：光学设计 二维线纹 光学狭缝 光电显微镜 

分 类 号：O439[机械工程—光学工程]