声表面波滤波放大器研究进展  

Research Progress of Surface Acoustic Wave Filter Amplifiers

作　　者：袁洋 陈发 罗为[1,2] YUAN Yang;CHEN Fa;LUO Wei(School of Optical and Electronic Information,Huazhong University of Science and Technology,Wuhan 430074,China;Research Institute of Huazhong University of Science and Technology in Shenzhen,Shenzhen 518063,China)

机构地区：[1]华中科技大学光学与电子信息学院,湖北武汉430074 [2]深圳华中科技大学研究院,广东深圳518063

出　　处：《压电与声光》2022年第5期673-677,共5页Piezoelectrics & Acoustooptics

基　　金：国家自然科学基金资助项目(No.11874169);深圳市科技计划项目(GJHZ20210705142539009)。

摘　　要：基于声电放大效应的声表面波滤波器具有高集成度、非互异性等优势,在国防及商业领域有着广泛的应用前景。同时,新型材料和结构的研究也为未来高集成度的声表面波滤波放大器的制备提供了新思路和新方向。该文介绍了声表面波声电放大机理,分析了器件常用结构,并总结了部分器件性能指标,这对声表面波滤波放大器的应用与推广具有一定的借鉴意义。Surface Acoustic Wave(SAW)filters based on the acoustoelectric amplification effect have the advantages of high integration and non-reciprocity,and have a wide application prospects in the national defense and commercial fields.At the same time,the research of new materials and structures provides new ideas and directions for the preparation of future highly integrated SAW filter amplifiers.The mechanism of SAW acoustoelectric amplification is introduced in this paper,the commonly used structures of the devices are analyzed,and the performance specifications of some devices are summarized,which have certain reference significance for the application and promotion of SAW filter amplifiers.

关 键 词：声表面波 声电效应 滤波器 放大器 高迁移率 

分 类 号：TN384[电子电信—物理电子学] TN713