基于0.18μm SMIC工艺的一款TDC芯片设计  

Design of a TDC chip based on 0.18μm SMIC technology

作　　者：马毅超[1] 王亮懿 滕海云 蒋俊国 MA Yichao;WANG Liangyi;TENG Haiyun;JIANG Junguo(Shaanxi University of Science&Technology,Xi'an 710021,China;Institute of High Energy Physics,Chinese Academy of Sciences,Dongguan 523000,China)

机构地区：[1]陕西科技大学,西安710021 [2]中国科学院高能物理研究所,东莞523000

出　　处：《核技术》2022年第11期44-51,共8页Nuclear Techniques

基　　金：国家自然科学基金(No.11975255)资助。

摘　　要：为适应高能物理实验中飞行时间探测器对高速飞行粒子高分辨率的时间测量需求,本文提出了一种差分结构的时间数字转换器(Time to Digital Convertor,TDC),其主要测量部分采用差分延迟环实现,并基于该结构设计了一款TDC芯片。差分延迟环TDC主要由时间测量核心模块、时间测量数据传输模块、延迟环校准模块以及时钟产生模块组成。对于时间测量核心模块,又将其细化为延迟环模块、温度计码生成模块以及粗计数与细计数生成模块三个部分。该TDC芯片采用中芯国际(Semiconductor Manufacturing International Corporation,SMIC)0.18μm工艺,版图面积为1.35 mm×1.35 mm,分辨率达到17 ps,精度达到8.5 ps(Root Mean Square,RMS),动态范围为0~210μs,可以满足通常情况下高能物理实验的高精度时间测量需求。[Background]The measurement of time-of-flight is one of the indispensable experimental contents in contemporary high-energy physics experiments and plays a vital role in exploring the essence of particle physics.[Purpose]This study aims to design a time to digital convertor(TDC)chip that meets the high-resolution time measurement requirements of time-of-flight detectors for high-speed flying particles in high-energy physics experiments.[Methods]First of all,a differential structure TDC was proposed and the main measurement part was realized by differential delay loop composed of time measurement core module,time measurement data transmission module,delay loop calibration module and clock generation module.Based on this structure,three parts of delay loop module,thermometer code generation module,and coarse count and fine count generation module were integrated into the core module of time measurement,and the 0.18μm SMIC(Semiconductor Manufacturing International Corporation)process was adopted to achieve the TDC chip design.[Results&Conclusions]The designed TDC chip has a layout area of 1.35 mm×1.35 mm,a resolution of 17 ps,an accuracy of 8.5 ps(Root Mean Square,RMS),and a dynamic range of 0~210μs.It can meet the current requirements for high-precision time measurement in high-energy physics.

关 键 词：差分延迟环TDC 高分辨率 0.18 μm工艺 SMIC 

分 类 号：TN791[电子电信—电路与系统] O572.21[理学—粒子物理与原子核物理]