飞秒激光单体素加工连续渐变微纳针形结构研究(特邀)  

Investigation on Fabricating Continuous Gradient Micro/nano Needle Structure by Single Femtosecond Laser Voxel(Invited)

作　　者：张琛 侯嘉庆 蔺家琪 李凯 范连斌 张策 王凯歌 白晋涛 ZHANG Chen;HOU Jiaqing;LIN Jiaqi;LI Kai;FAN Lianbin;ZHANG Ce;WANG Kaige;BAI Jintao(State Key Laboratory of Photon-technology in Western China Energy,Institute of Photonics&Photon Technology,School of Physics,Northwest University,Xi′an 710127,China;The 404 Company Limited China National Nuclear Corporation,Jiayuguan,Gansu 735100,China)

机构地区：[1]西北大学物理学院光子学与光子技术研究所省部共建西部能源光子技术国家重点实验室,西安710127 [2]中核四〇四有限公司,甘肃嘉峪关735100

出　　处：《光子学报》2022年第10期5-13,共9页Acta Photonica Sinica

基　　金：国家重大科研仪器研制项目(No.51927804);国家自然科学基金(Nos.61378083,61405159,11504294);国家自然科学基金重大基础研究计划培育项目(No.91123030);陕西省科技创新团队项目(No.S2018‒ZC‒TD‒0061)。

摘　　要：针对目前微纳针形结构加工中存在的精度、形貌、可控性等问题,基于飞秒激光双光子加工系统中的单个体素,通过引入一维倾角自动调控体素的空间位置,提出了一种简单高效的加工连续渐变微纳针形结构的方法。通过开展加工实验,成功地在光刻胶材料中加工出了一系列长度可控、形貌连续渐变的微纳针形结构。实验结果表明:基于本方法加工的微纳针形结构,其高度呈线性变化关系且针尖形貌渐变精度达到了纳米量级,结构横向线宽渐变连续且沿中轴线呈对称分布;针形结构顶端最小高度达到5 nm,横向最小线宽为195 nm。其在功能表面、微纳流控、生物传感等研究领域具有潜在的应用价值。Micro-nano needle structure with continuously gradient morphology has the capacity of generating asymmetric Laplace pressure,simulating mechanical environment in nano newton grade,adjusting the ion migration rate etc.,therefore,it has been widely applied in many fields such as microdroplet manipulation,biosensors,and ion rectification.However,in the previous fabrication of micro-nano needle structures with Two-Photon Polymerization(TPP),the structures were mainly constructed through the layer-by-layer scanning of laser focus.The bottom diameter or the height of the needle structure was usually in the grade of several or hundreds of micrometers.Further,the processing accuracy of the needles was generally in the grade of 100 nm,which resulted in the discontinuous morphology of the needle structures.On the other hand,the bottom diameter and structure height of micronano needle structures based on laser ablation or laser-assisted processing could be several micrometers,and the tip diameter could be less than 100 nm,however,the morphology and distribution of the needle structures were highly random.Considering the problems of precision,morphology and controllability in the previous fabrication of micro-nano needle structures,this paper proposes a novel method utilizing single voxel of femtosecond laser two-photon system to creating micro-nano needle-shaped structure with continuously changing morphology.In this methodology,a one-dimensional inclination angle is brought in the platform to automatically and linearly adjust the laser voxel to axially sink into the substrate completely as the stage is horizontally scanning.Finally,a micro-nano needle structure with continuous gradient morphology is produced.It is well known that,the voxel size in two-photon processing is the joint action of laser power,exposure time,scanning speed,and photoresist properties etc.,the voxel might have similar size with different processing parameter combinations.Therefore,in this methodology,the size of the voxel should be calibrated firstl

关 键 词：飞秒激光 单体素 双光子聚合 连续渐变 微纳针形结构 

分 类 号：O437[机械工程—光学工程]