二氧化钒薄膜的制备技术及应用进展(特邀)  

Preparation Technology and Application of Vanadium Dioxide Thin Films(Invited)

作　　者：石倩倩 王江 程光华 SHI Qianqian;WANG Jiang;CHENG Guanghua(School of Artificial Intelligence,Optics and Electronics(iOPEN),Northwestern Polytechnical University,Xi′an 710072,China;Xi′an Institute of Optics and Precision Mechanics,Chinese Academy of Sciences,Xi′an 710119,China)

机构地区：[1]西北工业大学光电与智能研究院,西安710072 [2]中国科学院西安光学精密机械研究所,西安710119

出　　处：《光子学报》2022年第10期332-350,共19页Acta Photonica Sinica

基　　金：国家自然科学基金(No.61875226);陕西省自然科学基金(No.2022JQ‒013)。

摘　　要：二氧化钒具有从金属相到绝缘体相发生可逆相变的特性,在68℃,分子结构从单斜结构转换成金红石结构,同时伴随着光学、电学和热学性质的快速突变,使得二氧化钒被广泛应用于热光调控、光学防护、红外伪装、离子电池和化学传感等领域。本文总结了二氧化钒薄膜新颖的制备技术、研究现状以及各种技术的优缺点,分析了应力、掺杂、缺陷等因素对二氧化钒相变特性的显著影响,归纳了二氧化钒的相变机理和支持相关相变机理的证据,列举了二氧化钒在不同热门领域中的应用,并对二氧化钒的发展方向和应用前景进行了总结和展望。Vanadium dioxide(VO_(2))has attracted many attention of researchers since it was discovered in 1959 to have the reversible phase transition from metal to insulator.Before and after the phase transition,its optical,electrical and thermal properties change dramatically.Therefore,vanadium dioxide is widely used in the fields of thermal light control,infrared and optical protection camouflage,ion batteries and chemical sensors.In order to enable domestic researchers to have a more comprehensive and in-depth understanding of this interesting material with broad application prospects,this paper reviews the latest progress of vanadium dioxide film preparation technology in the past five years and its applications in different hot areas.First,we introduce the structure and phase transition mechanism of VO_(2).When the temperature exceeds 68℃,VO_(2) will undergo a phase transition from insulator to metal,and its crystal structure will change from monoclinic insulator to rutile metal structure.At the same time,because the crystal structure of vanadium dioxide changes after phase transformation,its corresponding energy band structure also changes.Because the crystal structure and energy band structure of VO_(2) change suddenly before and after the phase transition,people devote themselves to exploring the physical mechanism of its phase transition.Up to now,there have been many research on the VO_(2) phase transition mechanism,and also various research methods and devices,but there is no accurate and unified statement.In this paper,we focus on three mainstream explanations of phase transition mechanisms:the first is electron-electron correlation mechanism,i.e.electron correlation driven Mott transition;The second is the electron phonon interaction mechanism,i.e.crystal structure driven Peierls transition.The third is that electron correlation and crystal structure jointly drive VO_(2) phase transition,and the supporting evidence is summarized.In addition,the phase transition characteristics of vanadium dioxide films are c

关 键 词：二氧化钒 薄膜 金属-绝缘体相变 晶型结构 制备技术 

分 类 号：TB43[一般工业技术]