纳秒激光薄膜损伤机理和应用研究  

Research on damage mechanism and application of nanosecond laser coatings

作　　者：程鑫彬[1] 焦宏飞[1] 张锦龙[1] 钮信尚 马彬[1] 沈正祥[1] 王占山[1] CHENG Xinbin;JIAO Hongfei;ZHANG Jinlong;NIU Xinshang;MA Bin;SHEN Zhenxiang;WANG Zhanshan(Institute of Precision Optical Engineering,MOE Key Laboratory of Advanced Micro-Structured Materials,Shanghai Frontiers Science Center of Digital Optics,Shanghai Professional Technical Service Platform for Full-Spectrum and High-Performance Optical Thin Film Devices and Applications,School of Physics Science and Engineering,Tongji University,Shanghai 200092,China)

机构地区：[1]同济大学物理科学与工程学院精密光学工程技术研究所,先进微结构材料教育部重点实验室,上海市数字光学前沿科学研究基地,上海市全光谱高性能光学薄膜器件与应用专业技术服务平台,上海200092

出　　处：《光学精密工程》2022年第21期2568-2590,共23页Optics and Precision Engineering

基　　金：国家自然科学基金资助项目(No.61975155,No.62061136008,No.62275196);上海市科学技术委员会科技计划项目(No.20JC1414600,No.21JC1406100);上海市级科技重大专项-人工智能基础理论与关键核心技术(No.2021SHZDZX0100);中央高校基本科研业务费专项资金资助项目。

摘　　要：根据我国强激光装置建设和工程任务对强激光薄膜元件的需求,基于对薄膜损伤机制的认识,同济大学提出了“全流程定量化”控制缺陷制备激光薄膜的思路。同济大学利用结构、性质可控人工小球制作定量化人工缺陷,系统研究了基板加工、超声清洗、电场模拟与调控、镀膜材料与工艺选择、镀后后处理、激光预处理、传递与保存等因素对薄膜元件激光损伤特性和损伤规律的影响。从损伤形貌和损伤规律上证实了节瘤缺陷电场增强理论模型的正确性,促进了研究人员对节瘤缺陷损伤机制的认知深度,提出了提升薄膜损伤性能的新途径,创建了新材料,实现了可兼顾环境稳定性、光谱特性和损伤特性的多功能强激光薄膜制备,有力支撑了我国强激光装置建设和激光技术的进一步提升。According to the requirements for high-power laser coating components in the construction of high-power laser facilities in China and,based on the understanding of the damage mechanism of laser coatings,our team at Tongji University has proposed the concept of quantitatively controlling defects in the whole process to prepare laser coatings. Quantitative artificial defects have also been fabricated by using artificial SiO2 spheres with controllable structure and properties. Over the past few decades,we have systematically and quantitatively studied the effects of substrate processing,ultrasonic cleaning,electric field simulation and adjustment,choices of coating material and process parameters,post-treatment after coating,laser conditioning,transferring and preservation of the laser damage characteristics,and damage rules of laser coating components. The validity of the theoretical model of nodule defect electric field enhancement was verified in this study on the basis of the damage morphologies and damage rules,thereby promoting the understanding of the nodule defect damage mechanism. We created new materials and proposed a series of new approaches to improve the damage properties of thin films,realizing the preparation of multifunctional high-intensity laser films that can account for environmental stability,spectral characteristics,and damage characteristics. Our findings will potentially aid the construction of high-power laser facilities and further improvement of laser technology in China.

关 键 词：激光薄膜 激光损伤 节瘤 人工缺陷 电场增强 

分 类 号：O484.4[理学—固体物理] TB43[理学—物理]